naa a22 4500 510801994 CHVBK 20180411083359.0 cr unu---uuuuu 180411e20130701xx s 000 0 eng 10.1007/s11664-012-2453-3 doi (NATIONALLICENCE)springer-10.1007/s11664-012-2453-3 Impact of Thermal Radiation on the Performanceof Ultrasmall Microcoolers [Elektronische Daten] [Ryan Shea, Anand Gawarikar, Joseph Talghader] On extremely small scales, traditional microcooler performance estimates must be corrected to include losses due to radiation. We present a method for analysis of microcoolers having a significant radiative contribution to their thermal conductance. We have fabricated ultrasmall microcoolers from sputtered Bi2Te3/Sb2Te3 thermoelectric junctions with cooling volumes of 200μm×200μm×65nm, which we believe to be the smallest microcoolers ever made. The devices are highly thermally isolated with total thermal conductance under 5×10−7W/K in vacuum at room temperature. By fitting the temperature response to input power of the devices in vacuum, we have quantified the nonlinearity of the response to calculate the radiative and film contributions to the total thermal conductance of the device. Three device geometries are presented, with radiative contributions to thermal conductance of 15%, 26%, and 100% depending on their emissive area and support structure. The cooling capabilities of these devices are also measured with maximum cooling of 3.1K for the 15% radiation-limited device and 2.6K for the 26% radiation-limited device, with power consumptions below 5μW. TMS, 2013 Microcooler nationallicence radiation nationallicence heat transfer nationallicence MEMS nationallicence Shea Ryan University of Minnesota, 200 Union St SE, 55117, Minneapolis, MN, USA aut Gawarikar Anand University of Minnesota, 200 Union St SE, 55117, Minneapolis, MN, USA aut Talghader Joseph University of Minnesota, 200 Union St SE, 55117, Minneapolis, MN, USA aut Journal of Electronic Materials Springer US; http://www.springer-ny.com 42/7(2013-07-01), 1870-1876 0361-5235 42:7<1870 2013 42 11664 https://doi.org/10.1007/s11664-012-2453-3 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11664-012-2453-3 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Shea Ryan University of Minnesota, 200 Union St SE, 55117, Minneapolis, MN, USA aut NATIONALLICENCE 700 1- Gawarikar Anand University of Minnesota, 200 Union St SE, 55117, Minneapolis, MN, USA aut NATIONALLICENCE 700 1- Talghader Joseph University of Minnesota, 200 Union St SE, 55117, Minneapolis, MN, USA aut NATIONALLICENCE 773 0- Journal of Electronic Materials Springer US; http://www.springer-ny.com 42/7(2013-07-01), 1870-1876 0361-5235 42:7<1870 2013 42 11664 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer