naa a22 4500 510802850 CHVBK 20180411083403.0 cr unu---uuuuu 180411e20130701xx s 000 0 eng 10.1007/s11664-012-2409-7 doi (NATIONALLICENCE)springer-10.1007/s11664-012-2409-7 Measurement of Thermoelectric Properties of Single Semiconductor Nanowires [Elektronische Daten] [S. Karg, P. Mensch, B. Gotsmann, H. Schmid, P. Kanungo, H. Ghoneim, V. Schmidt, M. Björk, V. Troncale, H. Riel] We have measured the thermopower and the thermal conductivity of individual silicon and indium arsenide nanowires (NWs). In this study, we evaluate a self-heating method to determine the thermal conductivity λ. Experimental validation of this method was performed on highly n-doped Si NWs with diameters ranging from 20nm to 80nm. The Si NWs exhibited electrical resistivity of $$\rho = (8\pm4)\, \hbox{m}\Upomega\,\hbox{cm}$$ ρ = ( 8 ± 4 ) m Ω cm at room temperature and Seebeck coefficient of −(250±100)μV/K. The thermal conductivity of Si NWs measured using the proposed method is very similar to previously reported values; e.g., for Si NWs with 50nm diameter, λ = 23W/(mK) was obtained. Using the same method, we investigated InAs NWs with diameter of 100nm and resistivities of $$\rho = (25\pm5)\, \hbox{m}\Upomega\,\hbox{cm}$$ ρ = ( 25 ± 5 ) m Ω cm at room temperature. Thermal conductivity of λ = 1.8W/(mK) was obtained, which is about 20 to 30 times smaller than in bulk InAs. We analyzed the accuracy of the self-heating method by means of analytical and numerical solution of the one-dimensional (1-D) heat diffusion equation taking various loss channels into account. For our NWs suspended from the substrate with low-impedance contacts the relative error can be estimated to be≤25%. TMS, 2013 Thermopower nationallicence thermal conductivity nationallicence Seebeck coefficient nationallicence self-heating method nationallicence Karg S. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Mensch P. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Gotsmann B. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Schmid H. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Kanungo P. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Ghoneim H. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Schmidt V. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Björk M. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Troncale V. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Riel H. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut Journal of Electronic Materials Springer US; http://www.springer-ny.com 42/7(2013-07-01), 2409-2414 0361-5235 42:7<2409 2013 42 11664 https://doi.org/10.1007/s11664-012-2409-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11664-012-2409-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Karg S. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 700 1- Mensch P. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 700 1- Gotsmann B. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 700 1- Schmid H. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 700 1- Kanungo P. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 700 1- Ghoneim H. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 700 1- Schmidt V. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 700 1- Björk M. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 700 1- Troncale V. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 700 1- Riel H. IBM Research-Zurich, Säumerstrasse 4, 8803, Rüschlikon, Switzerland aut NATIONALLICENCE 773 0- Journal of Electronic Materials Springer US; http://www.springer-ny.com 42/7(2013-07-01), 2409-2414 0361-5235 42:7<2409 2013 42 11664 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer