naa a22 4500 510804985 CHVBK 20180411083412.0 cr unu---uuuuu 180411e20131101xx s 000 0 eng 10.1007/s11664-013-2682-0 doi (NATIONALLICENCE)springer-10.1007/s11664-013-2682-0 Strain Determination in Quasi-Lattice-Matched LWIR HgCdTe/CdZnTe Layers [Elektronische Daten] [P. Ballet, X. Baudry, B. Polge, D. Brellier, J. Merlin, P. Gergaud] We take advantage of the zinc distribution of (211)B CdZnTe substrates to probe the lattice-mismatch-induced stress in long-wave infrared HgCdTe layers grown by molecular beam epitaxy. High-resolution x-ray diffraction is used to accurately determine the strain-free lattice parameters of both CdZnTe and HgCdTe, together with the in-plane components of the stress tensor. By using several wafers, the stress evolution is derived over a broad range of lattice mismatch. In particular, stress relaxation is evidenced for mismatch greater than 0.02% and 0.04% for tensile and compressively strained HgCdTe, respectively. In-plane strain anisotropy, expected for the (211) orientation, is only evidenced for the compressive configuration. Strain relaxation is correlated with substrate curvature and rocking-curve peak broadening, providing indirect evidence for plastic relaxation. TMS, 2013 Strain nationallicence HRXRD nationallicence HgCdTe nationallicence MBE nationallicence Ballet P. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut Baudry X. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut Polge B. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut Brellier D. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut Merlin J. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut Gergaud P. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut Journal of Electronic Materials Springer US; http://www.springer-ny.com 42/11(2013-11-01), 3133-3137 0361-5235 42:11<3133 2013 42 11664 https://doi.org/10.1007/s11664-013-2682-0 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11664-013-2682-0 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ballet P. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut NATIONALLICENCE 700 1- Baudry X. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut NATIONALLICENCE 700 1- Polge B. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut NATIONALLICENCE 700 1- Brellier D. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut NATIONALLICENCE 700 1- Merlin J. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut NATIONALLICENCE 700 1- Gergaud P. CEA—LETI, MINATEC Campus, 17, Rue des Martys, 38054, Grenoble, France aut NATIONALLICENCE 773 0- Journal of Electronic Materials Springer US; http://www.springer-ny.com 42/11(2013-11-01), 3133-3137 0361-5235 42:11<3133 2013 42 11664 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer