naa a22 4500 510805256 CHVBK 20180411083413.0 cr unu---uuuuu 180411e20131101xx s 000 0 eng 10.1007/s11664-013-2657-1 doi (NATIONALLICENCE)springer-10.1007/s11664-013-2657-1 Comparison of the Schaake and Benson Etches to Delineate Dislocations in HgCdTe Layers [Elektronische Daten] [S. Farrell, Mulpuri Rao, G. Brill, Y. Chen, P. Wijewarnasuriya, N. Dhar, J. Benson, K. Harris] The morphology and classification of etch pits in molecular beam epitaxy-grown (211) HgCdTe/CdTe/Si layers were investigated using the Schaake and Benson etch pit density (EPD) etches. The two EPD etches were compared and shown to have a 1:1 correlation in the etch pits that were produced. Close examination of the shape of the etch pits via scanning electron microscopy shows that several distinguishable classifications of etch pits are revealed using both etches. Samples subjected to thermal cycle annealing (TCA) treatment show a nonuniform reduction in etch pit populations according to the classification defined in this study. In particular, a class of etch pits called "fish shaped” are completely absent after TCA and can account for up to one-third of the total reduction in EPD. TMS (outside the USA), 2013 HgCdTe nationallicence EPD nationallicence MBE nationallicence thermal cycle annealing nationallicence dislocations nationallicence Schaake etch nationallicence Benson etch nationallicence SEM nationallicence Farrell S. Department of Electrical and Computer Engineering, George Mason University, 22030-4444, Fairfax, VA, USA aut Rao Mulpuri Department of Electrical and Computer Engineering, George Mason University, 22030-4444, Fairfax, VA, USA aut Brill G. U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Road, 20783, Adelphi, MD, USA aut Chen Y. U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Road, 20783, Adelphi, MD, USA aut Wijewarnasuriya P. U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Road, 20783, Adelphi, MD, USA aut Dhar N. U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Road, 20783, Adelphi, MD, USA aut Benson J. U.S. Army RDECOM CERDEC Night Vision and Electronic Sensors Directorate, Ft. Belvoir, VA, USA aut Harris K. Penn State Electro-Optics Center, 222 Northpointe Blvd., 16229, Freeport, PA, USA aut Journal of Electronic Materials Springer US; http://www.springer-ny.com 42/11(2013-11-01), 3097-3102 0361-5235 42:11<3097 2013 42 11664 https://doi.org/10.1007/s11664-013-2657-1 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11664-013-2657-1 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Farrell S. Department of Electrical and Computer Engineering, George Mason University, 22030-4444, Fairfax, VA, USA aut NATIONALLICENCE 700 1- Rao Mulpuri Department of Electrical and Computer Engineering, George Mason University, 22030-4444, Fairfax, VA, USA aut NATIONALLICENCE 700 1- Brill G. U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Road, 20783, Adelphi, MD, USA aut NATIONALLICENCE 700 1- Chen Y. U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Road, 20783, Adelphi, MD, USA aut NATIONALLICENCE 700 1- Wijewarnasuriya P. U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Road, 20783, Adelphi, MD, USA aut NATIONALLICENCE 700 1- Dhar N. U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Road, 20783, Adelphi, MD, USA aut NATIONALLICENCE 700 1- Benson J. U.S. Army RDECOM CERDEC Night Vision and Electronic Sensors Directorate, Ft. Belvoir, VA, USA aut NATIONALLICENCE 700 1- Harris K. Penn State Electro-Optics Center, 222 Northpointe Blvd., 16229, Freeport, PA, USA aut NATIONALLICENCE 773 0- Journal of Electronic Materials Springer US; http://www.springer-ny.com 42/11(2013-11-01), 3097-3102 0361-5235 42:11<3097 2013 42 11664 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer