naa a22 4500 510814492 CHVBK 20180411083459.0 cr unu---uuuuu 180411e20130101xx s 000 0 eng 10.1134/S0031918X12110063 doi (NATIONALLICENCE)springer-10.1134/S0031918X12110063 Structure, composition, and physicomechanical characteristics of HfB2 and Hf-B-N films [Elektronische Daten] [A. Goncharov, S. Dub, A. Agulov] The paper deals with the study of the effect of the deposition conditions (the bias potential and substrate temperature) on the structure, composition, and physicomechanical characteristics of nanocrystalline films of hafnium diboride and boridonitride formed by the method of nonreactive (in Ar) and reactive (in Ar + N2) HF magnetron sputtering, respectively. The optimal conditions for the deposition of the hafnium diboride coatings with growth texture in plane (00.1) and the best physicomechanical characteristics are deter-mined. It is shown that at a bias potential of ±50 V and a substrate temperature of ∼500°C superstoichiometric highly textured films are formed with a nanohardness of 44 GPa and an elastic modulus of 396 ± 11 GPa. A relation between the composition, structure, and physicomechanical characteristics of the films is found. Reactive sputtering in (Ar + N2) makes it possible to produce amorphous-crystalline films of the composite (HfB2 + BN) that consists of grains of the HfB2 nanocrystalline phase, the spaces between which are filled with the amorphous phase of graphite-like BN. Pleiades Publishing, Ltd., 2013 nanocrystalline films nationallicence hafnium diboride nationallicence diffraction pattern nationallicence Goncharov A. Donbass State Academy of Machine Building, 83013, Kramatorsk, Donetsk Region, Ukraine aut Dub S. Bakul' Institute of Superhard Materials, National Academy of Sciences of Ukraine, ul. Avtozavodskaya 2, 04074, Kiev, Ukraine aut Agulov A. Donbass State Academy of Machine Building, 83013, Kramatorsk, Donetsk Region, Ukraine aut The Physics of Metals and Metallography SP MAIK Nauka/Interperiodica 114/1(2013-01-01), 95-101 0031-918X 114:1<95 2013 114 11508 https://doi.org/10.1134/S0031918X12110063 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1134/S0031918X12110063 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Goncharov A. Donbass State Academy of Machine Building, 83013, Kramatorsk, Donetsk Region, Ukraine aut NATIONALLICENCE 700 1- Dub S. Bakul' Institute of Superhard Materials, National Academy of Sciences of Ukraine, ul. Avtozavodskaya 2, 04074, Kiev, Ukraine aut NATIONALLICENCE 700 1- Agulov A. Donbass State Academy of Machine Building, 83013, Kramatorsk, Donetsk Region, Ukraine aut NATIONALLICENCE 773 0- The Physics of Metals and Metallography SP MAIK Nauka/Interperiodica 114/1(2013-01-01), 95-101 0031-918X 114:1<95 2013 114 11508 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer