naa a22 4500 510817785 CHVBK 20180411083516.0 cr unu---uuuuu 180411e20130601xx s 000 0 eng 10.1007/s11468-012-9462-1 doi (NATIONALLICENCE)springer-10.1007/s11468-012-9462-1 Sensing Nanometer Depth of Focused Optical Fields with Scanning Surface Plasmon Microscopy [Elektronische Daten] [Lotfi Berguiga, Elise Boyer-Provera, Juan Elezgaray, Françoise Argoul] Evanescent wave imaging has been developed in the past decades for discriminating sub-micronic structures confined on a planar surface from bulk medium. However, this imaging method assumes a correct orientation of the objective lens versus the normal of the sample plane (null tilt angle) for a uniform evanescent illumination of the sample. Here, we propose to use the $V(Z)$ response of a heterodyne scanning microscope coupled to a high numerical aperture lens to compensate the tilt, scanning images in three dimensions. This method can be used in standard glass to dielectric reflection regime or coupled to surface plasmon resonance. We show that in the second case, we can afford tilt angle corrections better than 10 $^{-4}$ radian. As an illustration, this method is applied to a patterned surface with nanometer-squared silica islets and to adsorbed nanoparticles. Springer Science+Business Media New York, 2012 Surface plasmon microscopy nationallicence Evanescent waves nationallicence Heterodyne interferometry nationallicence Scanning microscopy nationallicence Inverse problem nationallicence Berguiga Lotfi CNRS, USR3010, Université de Lyon, Ecole Normale Supérieure de Lyon, 46 Allée d'Italie, 69007, Lyon, France aut Boyer-Provera Elise CNRS, USR3010, Université de Lyon, Ecole Normale Supérieure de Lyon, 46 Allée d'Italie, 69007, Lyon, France aut Elezgaray Juan CNRS, UMR 5248, Université Bordeaux 1-ENITAB, 2 rue Robert Escarpit, 33607, Pessac, France aut Argoul Françoise CNRS, USR3010, Université de Lyon, Ecole Normale Supérieure de Lyon, 46 Allée d'Italie, 69007, Lyon, France aut Plasmonics Springer US; http://www.springer-ny.com 8/2(2013-06-01), 715-722 1557-1955 8:2<715 2013 8 11468 https://doi.org/10.1007/s11468-012-9462-1 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11468-012-9462-1 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Berguiga Lotfi CNRS, USR3010, Université de Lyon, Ecole Normale Supérieure de Lyon, 46 Allée d'Italie, 69007, Lyon, France aut NATIONALLICENCE 700 1- Boyer-Provera Elise CNRS, USR3010, Université de Lyon, Ecole Normale Supérieure de Lyon, 46 Allée d'Italie, 69007, Lyon, France aut NATIONALLICENCE 700 1- Elezgaray Juan CNRS, UMR 5248, Université Bordeaux 1-ENITAB, 2 rue Robert Escarpit, 33607, Pessac, France aut NATIONALLICENCE 700 1- Argoul Françoise CNRS, USR3010, Université de Lyon, Ecole Normale Supérieure de Lyon, 46 Allée d'Italie, 69007, Lyon, France aut NATIONALLICENCE 773 0- Plasmonics Springer US; http://www.springer-ny.com 8/2(2013-06-01), 715-722 1557-1955 8:2<715 2013 8 11468 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer