naa a22 4500 510817912 CHVBK 20180411083517.0 cr unu---uuuuu 180411e20130601xx s 000 0 eng 10.1007/s11468-013-9511-4 doi (NATIONALLICENCE)springer-10.1007/s11468-013-9511-4 Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10nm Resolution [Elektronische Daten] [Jie Zhou, Changtao Wang, Zeyu Zhao, Yanqin Wang, Jiayu He, Xing Tao, Xiangang Luo] Ag tip-insulator-metal structure with bottom-up light illumination is proposed and theoretically analyzed. It shows that there is a strong plasmonic coupling between Ag tip and metallic surface. Different from oblique light illumination, this novel design possesses unique advantages of symmetrical hot spot profile and enlarged depth of focus at a sub-10-nm spatial resolution. Influences of tip size, insulator, and metallic layer thickness are studied. It is found that the metallic layer thickness greatly affects the plasmonic hot spot quality. Meanwhile, the thickness of photoresist plays a major role in controlling light spot size, indicating that much higher resolution can be achieved for the Ag tips with large curvature radius. Springer Science+Business Media New York, 2013 Plasmonics nationallicence Surface plasmons nationallicence Nano-lithography nationallicence Laser material processing nationallicence Zhou Jie State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut Wang Changtao State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut Zhao Zeyu State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut Wang Yanqin State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut He Jiayu State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut Tao Xing State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut Luo Xiangang State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut Plasmonics Springer US; http://www.springer-ny.com 8/2(2013-06-01), 1073-1078 1557-1955 8:2<1073 2013 8 11468 https://doi.org/10.1007/s11468-013-9511-4 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11468-013-9511-4 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Zhou Jie State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut NATIONALLICENCE 700 1- Wang Changtao State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut NATIONALLICENCE 700 1- Zhao Zeyu State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut NATIONALLICENCE 700 1- Wang Yanqin State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut NATIONALLICENCE 700 1- He Jiayu State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut NATIONALLICENCE 700 1- Tao Xing State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut NATIONALLICENCE 700 1- Luo Xiangang State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, 610209, Chengdu, China aut NATIONALLICENCE 773 0- Plasmonics Springer US; http://www.springer-ny.com 8/2(2013-06-01), 1073-1078 1557-1955 8:2<1073 2013 8 11468 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer