naa a22 4500 510818773 CHVBK 20180411083520.0 cr unu---uuuuu 180411e20130101xx s 000 0 eng 10.1007/s11814-012-0124-y doi (NATIONALLICENCE)springer-10.1007/s11814-012-0124-y Preparation of anodic aluminum oxide (AAO) nano-template on silicon and its application to one-dimensional copper nano-pillar array formation [Elektronische Daten] [Lan Shen, Mubarak Ali, Zhengbin Gu, Bonggi Min, Dongwook Kim, Chinho Park] Anodized aluminum oxide (AAO) nanotemplates were prepared using the Al/Si substrates with an aluminum layer thickness of about 300 nm. A two-step anodization process was used to prepare an ordered porous alumina nanotemplate, and the pores of various sizes and depths were constructed electrochemically through anodic oxidation. The optimum morphological structure for large area application was constructed by adjusting the applied potential, temperature, time, and electrolyte concentration. SEM investigations showed that hexagonal-close-packed alumina nano-pore arrays were nicely constructed on Si substrate, having smooth wall morphologies and well-defined diameters. It is also reported that one dimensional copper nanopillars can be fabricated using the tunable nanopore sized AAO/Si template, by controlling the copper deposition process. Korean Institute of Chemical Engineers, Seoul, Korea, 2012 Anodic Aluminum Oxide (AAO) nationallicence Copper nationallicence Self-assembly nationallicence Nano-pore nationallicence Electrolyte nationallicence Shen Lan School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut Ali Mubarak School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut Gu Zhengbin School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut Min Bonggi Center for Research Facilities, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut Kim Dongwook School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut Park Chinho School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut Korean Journal of Chemical Engineering Springer US; http://www.springer-ny.com 30/1(2013-01-01), 221-227 0256-1115 30:1<221 2013 30 11814 https://doi.org/10.1007/s11814-012-0124-y text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11814-012-0124-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Shen Lan School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut NATIONALLICENCE 700 1- Ali Mubarak School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut NATIONALLICENCE 700 1- Gu Zhengbin School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut NATIONALLICENCE 700 1- Min Bonggi Center for Research Facilities, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut NATIONALLICENCE 700 1- Kim Dongwook School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut NATIONALLICENCE 700 1- Park Chinho School of Chemical Engineering, Yeungnam University, 214-1, Dae-dong, 712-749, Gyeongsan, Korea aut NATIONALLICENCE 773 0- Korean Journal of Chemical Engineering Springer US; http://www.springer-ny.com 30/1(2013-01-01), 221-227 0256-1115 30:1<221 2013 30 11814 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer