naa a22 4500 51082191X CHVBK 20180411083537.0 cr unu---uuuuu 180411e20130101xx s 000 0 eng 10.1007/s12541-013-0005-2 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0005-2 Analytical model to predict temperature distribution and ablation depth in excimer laser micromachining [Elektronische Daten] [Deepak Marla, Vishal Barde, Suhas Joshi] An analytical model to predict the temperature distribution and ablation depth in excimer laser ablation process by solving one-dimensional heat conduction equation has been proposed. The model takes into account aspects like temperature dependent thermal properties for polycarbonate material and re-solidification during pulse off-time. The effects of fluence and number of pulses with and without consideration to the temperature dependent thermal conductivity and pulse delay have been investigated. It is observed that consideration to temperature dependent thermal conductivity and re-solidification during pulse ‘off-time' results in an appreciable improvement in the accuracy of ablation depth prediction and the error being within ± 0.8 μm. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Laser ablation nationallicence Excimer laser nationallicence Micromachining nationallicence Analytical model nationallicence Multiple pulses nationallicence λ l : Thermal diffusivity of liquid region, m2/s nationallicence λ s : Thermal diffusivity of solid region, m2/s nationallicence k s : Thermal conductivity of solid region, W/mK nationallicence k l : Thermal conductivity of liquid region, W/mK nationallicence A s : Aborptivity of solid region nationallicence A l : Aborptivity of liquid region nationallicence R : Reflectivity nationallicence L : Latent heat, cal/g nationallicence T m : Melting temperature of substrate, K nationallicence T v : Vaporization temperature of substrate, K nationallicence T o : Ambient temperature, K nationallicence ρ s : Density of solid region, kg/m3 nationallicence ρ l : Density of liquid region, kg/m3 nationallicence S (t) : Position of interface between solid and liquid regions nationallicence δ l ( t ) : Temperature penetration depth in liquid region nationallicence δ s ( t ) : Temperature penetration depth in solid region nationallicence T w ( t ) : Temperature at the surface, K nationallicence I : Laser intensity, W/m2 nationallicence t m : Time required to reach melting temperature, s nationallicence c ps : Specific heat of solid region, J/kg K nationallicence c pl : Specific heat of Liquid region, J/kg K nationallicence x i : Shift in interface location nationallicence Marla Deepak Department of Mechanical Engineering, Indian Institute of Technology Bombay, 400076, Powai, Mumbai, Maharashtra, India aut Barde Vishal Department of Mechanical Engineering, Indian Institute of Technology Bombay, 400076, Powai, Mumbai, Maharashtra, India aut Joshi Suhas Department of Mechanical Engineering, Indian Institute of Technology Bombay, 400076, Powai, Mumbai, Maharashtra, India aut International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/1(2013-01-01), 29-36 2234-7593 14:1<29 2013 14 12541 https://doi.org/10.1007/s12541-013-0005-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0005-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Marla Deepak Department of Mechanical Engineering, Indian Institute of Technology Bombay, 400076, Powai, Mumbai, Maharashtra, India aut NATIONALLICENCE 700 1- Barde Vishal Department of Mechanical Engineering, Indian Institute of Technology Bombay, 400076, Powai, Mumbai, Maharashtra, India aut NATIONALLICENCE 700 1- Joshi Suhas Department of Mechanical Engineering, Indian Institute of Technology Bombay, 400076, Powai, Mumbai, Maharashtra, India aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/1(2013-01-01), 29-36 2234-7593 14:1<29 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer