naa a22 4500 510821944 CHVBK 20180411083537.0 cr unu---uuuuu 180411e20130101xx s 000 0 eng 10.1007/s12541-013-0001-6 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0001-6 Hybrid micromachining of glass using ECDM and micro grinding [Elektronische Daten] [Xuan Cao, Bo Kim, Chong Chu] Micro electrochemical discharge machining (ECDM) is a well-known machining process that achieves 3D micro structures in glasstype material. However, a rough surface is the main disadvantage of this process. In the present work, a hybrid process of ECDM and micro grinding using polycrystalline diamond (PCD)tools is investigated. Micro structures in glass workpieces were machined by ECDM and then ground by PCD tools to improve the surface quality. Micro grinding by PCD tools is used to overcome the rough surfaces that are generated by sparks in ECDM. The characteristics of micro grinding, such as the surface roughness of the tool, depth of cut, and feedrate, using PCD tools for ECDM structures were investigated. It is experimentally shown that the grinding process under PCD tools reduces the surface roughness of ECDM structures from a few tens of a μm to 0.05 μm Ra, and the total machining time of the hybrid process is less than a third compared to that under a conventional grinding process. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Micro Grinding nationallicence Glass nationallicence Electrochemical Discharge Machining nationallicence PCD nationallicence Cao Xuan School of Mechanical and Aerospace Engineering, Seoul National University, Gwanak 599 Gwanak-ro, Gwanak-gu, 151-742, Seoul, Korea aut Kim Bo Department of Mechanical Engineering, Soongsil University, 511 Sangdo-dong, Dongjak-gu, 156-743, Seoul, Korea aut Chu Chong School of Mechanical and Aerospace Engineering, Seoul National University, Gwanak 599 Gwanak-ro, Gwanak-gu, 151-742, Seoul, Korea aut International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/1(2013-01-01), 5-10 2234-7593 14:1<5 2013 14 12541 https://doi.org/10.1007/s12541-013-0001-6 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0001-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Cao Xuan School of Mechanical and Aerospace Engineering, Seoul National University, Gwanak 599 Gwanak-ro, Gwanak-gu, 151-742, Seoul, Korea aut NATIONALLICENCE 700 1- Kim Bo Department of Mechanical Engineering, Soongsil University, 511 Sangdo-dong, Dongjak-gu, 156-743, Seoul, Korea aut NATIONALLICENCE 700 1- Chu Chong School of Mechanical and Aerospace Engineering, Seoul National University, Gwanak 599 Gwanak-ro, Gwanak-gu, 151-742, Seoul, Korea aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/1(2013-01-01), 5-10 2234-7593 14:1<5 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer