naa a22 4500 510821995 CHVBK 20180411083537.0 cr unu---uuuuu 180411e20130101xx s 000 0 eng 10.1007/s12541-013-0009-y doi (NATIONALLICENCE)springer-10.1007/s12541-013-0009-y Generation and control of 3D standing wave illumination for wide-field high-resolution 3D microscopic measurement [Elektronische Daten] [Shin Usuki, Hiroyoshi Kanaka, Kenjiro Miura] Microscopic imaging is convenient, nondestructive, and has a high-throughput performance and compatibility with a number of applications. However, the spatial resolution of conventional light microscopy is limited to wavelength scale and the depth of field is extremely shallow; hence, it is difficult to obtain detailed 3D spatial data of the object to be measured. In this paper, we propose a new technique for generating and controlling 3D standing wave illumination based on the 3D interference of multiple laser beams. The proposed technique has possibility to provide lateral and axial resolution improvement as well as a wide 3D field of view. The spatial configuration of the interference beams was theoretically examined and the optimal incident angle of the multiple beams was confirmed. Numerical simulations were carried out and confirmed the generation of 3D standing wave illumination and spatial control of the illumination by using the phase shift of incident beams. Furthermore, we develop an experimental apparatus to demonstrate the generation of 3D standing wave illumination by four beam interference and spatial control with a piezoelectric transducer. Finally, basic experiments were performed using nanospheres to verify the generation, spatial intervals, and controllability of the phase shift of 3D standing wave illumination. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Standing Wave Illumination nationallicence Structured Illumination Microscopy nationallicence Multiple Beam Interference nationallicence Optical Microscopy nationallicence Super Resolution nationallicence Three Dimensional Imaging nationallicence 3D : three dimensional nationallicence NA : numerical aperture nationallicence FDTD : finite difference time domain nationallicence PZT : piezoelectric transducer nationallicence CCD : charge-coupled device nationallicence PSL : polystyrene latex nationallicence Usuki Shin Division of Global Research Leaders, Shizuoka University, Johoku 3-5-1, Naka-ku, 432-8561, Hamamatsu, Japan aut Kanaka Hiroyoshi Graduate School of Engineering, Shizuoka University, Johoku 3-5-1, Naka-ku, 432-8561, Hamamatsu, Japan aut Miura Kenjiro Graduate School of Science and Technology, Shizuoka University, Johoku 3-5-1, Naka-ku, 432-8561, Hamamatsu, Japan aut International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/1(2013-01-01), 55-60 2234-7593 14:1<55 2013 14 12541 https://doi.org/10.1007/s12541-013-0009-y text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0009-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Usuki Shin Division of Global Research Leaders, Shizuoka University, Johoku 3-5-1, Naka-ku, 432-8561, Hamamatsu, Japan aut NATIONALLICENCE 700 1- Kanaka Hiroyoshi Graduate School of Engineering, Shizuoka University, Johoku 3-5-1, Naka-ku, 432-8561, Hamamatsu, Japan aut NATIONALLICENCE 700 1- Miura Kenjiro Graduate School of Science and Technology, Shizuoka University, Johoku 3-5-1, Naka-ku, 432-8561, Hamamatsu, Japan aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/1(2013-01-01), 55-60 2234-7593 14:1<55 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer