naa a22 4500 510822010 CHVBK 20180411083537.0 cr unu---uuuuu 180411e20130101xx s 000 0 eng 10.1007/s12541-013-0020-3 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0020-3 A stitching algorithm for measuring large areas using scanning electron microscopes [Elektronische Daten] [Won-Pyo Hong, Seok-Woo Lee, Hon-Zong Choi] SEM is very useful measuring equipment in the micro and nano area. In general, it is not used to accurately measure the size information of a sample, but to measure its shape characteristics. In addition, it has a measuring area that is limited to just several micro-meters, and it is unsuitable for accurate measurements larger than several tens of micro meters. This paper proposed a stitching algorithm for the split electron beam images using an image processing technique to minimize measurement error. Experiments were conducted targeting circular and rectangular shapes 500 nm∼10 μ in diameter and line length. Finally, stitching accuracy was verified through a comparison with AFM measuring data. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 SEM (Scanning Electron Microscope) nationallicence Stitching nationallicence Split image nationallicence Image Processing nationallicence Edge Detection nationallicence Pixel nationallicence Hong Won-Pyo Korea Institute of Industrial Technology, 1278-18, Sa 3-dong, Sangrok-gu, 426-791, Ansan, South Korea aut Lee Seok-Woo Korea Institute of Industrial Technology, 1278-18, Sa 3-dong, Sangrok-gu, 426-791, Ansan, South Korea aut Choi Hon-Zong Korea Institute of Industrial Technology, 1278-18, Sa 3-dong, Sangrok-gu, 426-791, Ansan, South Korea aut International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/1(2013-01-01), 147-151 2234-7593 14:1<147 2013 14 12541 https://doi.org/10.1007/s12541-013-0020-3 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0020-3 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Hong Won-Pyo Korea Institute of Industrial Technology, 1278-18, Sa 3-dong, Sangrok-gu, 426-791, Ansan, South Korea aut NATIONALLICENCE 700 1- Lee Seok-Woo Korea Institute of Industrial Technology, 1278-18, Sa 3-dong, Sangrok-gu, 426-791, Ansan, South Korea aut NATIONALLICENCE 700 1- Choi Hon-Zong Korea Institute of Industrial Technology, 1278-18, Sa 3-dong, Sangrok-gu, 426-791, Ansan, South Korea aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/1(2013-01-01), 147-151 2234-7593 14:1<147 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer