naa a22 4500 510822401 CHVBK 20180411083539.0 cr unu---uuuuu 180411e20130601xx s 000 0 eng 10.1007/s12541-013-0131-x doi (NATIONALLICENCE)springer-10.1007/s12541-013-0131-x On-machine volumetric-error measurement and compensation methods for micro machine tools [Elektronische Daten] [Shih-Ming Wang, Ji-Jun Lin] The CNC micro machine tool is an essential of the micro machining process for manufacturing miniature high-tech products. A software-based error compensation method based on measured volumetric errors that can pre-compensate cutting path can further enhance a machine's accuracy without increasing its manufacturing cost. Considering the limited workspace of a micro machine tool and the instrument cost, an on-machine and vision-based measurement method integrating machine vision method with use of 3 COMs and homogeneous transformation method was proposed in this study. Sensitivity analysis was conducted to analyze the influence of the CMOS pixel error to the measurement accuracy. To improve the machining accuracy, the measured errors were directly compensated to the machining trajectory with use of an error compensation method that consists of an element-free error interpolation scheme and a recursive software error compensation scheme. Experiments on a toggle-type micro machine tool were conducted to verify the effectiveness of the proposed methods. The results have shown that the feasibility and effectiveness of the proposed methods. The tracking errors of the machine was further improved from (x = 7.9 μm, y = 4.1 μm) to (x = 5 μm, y = 3.7 μm). Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Micro machine tool nationallicence Volumetric error nationallicence On-machine Measurement nationallicence Error compensation nationallicence c : positive constant nationallicence γ : positive constant nationallicence R1 : a local reference coordinate frame nationallicence P : assigned on the left-up corner of the image nationallicence C and S : cosine and sine, respectively nationallicence i and j : the image errors in x- and y-axis nationallicence x′, y′, z′ : measured coordinates with errors nationallicence δ(I) : smaller than a pre-defined tolerance value nationallicence Pc : the error compensated coordinates nationallicence P0 : machining position nationallicence M : machine coordinate frame nationallicence Wang Shih-Ming Department of Mechanical Engineering, Chung Yuan Christian University, 32023, Chung-Li, Taiwan, ROC aut Lin Ji-Jun Department of Mechanical Engineering, Chung Yuan Christian University, 32023, Chung-Li, Taiwan, ROC aut International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/6(2013-06-01), 989-994 2234-7593 14:6<989 2013 14 12541 https://doi.org/10.1007/s12541-013-0131-x text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0131-x text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wang Shih-Ming Department of Mechanical Engineering, Chung Yuan Christian University, 32023, Chung-Li, Taiwan, ROC aut NATIONALLICENCE 700 1- Lin Ji-Jun Department of Mechanical Engineering, Chung Yuan Christian University, 32023, Chung-Li, Taiwan, ROC aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/6(2013-06-01), 989-994 2234-7593 14:6<989 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer