naa a22 4500 51082241X CHVBK 20180411083540.0 cr unu---uuuuu 180411e20130601xx s 000 0 eng 10.1007/s12541-013-0130-y doi (NATIONALLICENCE)springer-10.1007/s12541-013-0130-y Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape [Elektronische Daten] [Jae-Hoon Lee, Won-Jin Lee, Dong-Jae Shin, Gaasuren Daavasuren, Doo-Man Chun] Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Laser scribing nationallicence Overlapping rate nationallicence Rectangular beam nationallicence Energy saving nationallicence Bs : the bite size (mm) of adjacent beams nationallicence Ds : the laser beam spot size (mm) nationallicence x, y : the positions from the laser beam center (mm) nationallicence σ : the variance known as standard deviation nationallicence Lee Jae-Hoon School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut Lee Won-Jin School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut Shin Dong-Jae School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut Daavasuren Gaasuren School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut Chun Doo-Man School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/6(2013-06-01), 985-988 2234-7593 14:6<985 2013 14 12541 https://doi.org/10.1007/s12541-013-0130-y text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0130-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Lee Jae-Hoon School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut NATIONALLICENCE 700 1- Lee Won-Jin School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut NATIONALLICENCE 700 1- Shin Dong-Jae School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut NATIONALLICENCE 700 1- Daavasuren Gaasuren School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut NATIONALLICENCE 700 1- Chun Doo-Man School of Mechanical Engineering, University of Ulsan, 680-749, Ulsan, South Korea aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/6(2013-06-01), 985-988 2234-7593 14:6<985 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer