naa a22 4500 510822444 CHVBK 20180411083540.0 cr unu---uuuuu 180411e20130901xx s 000 0 eng 10.1007/s12541-013-0208-6 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0208-6 Characterization of electrostatic force for scanning electrostatic force microscopy of micro-structured surface [Elektronische Daten] [Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao] This paper presents the electrostatic force characterization of a prototype scanning electrostatic force microscope (SEFM) system developed for surface profile measurement in noncontact condition. In the SEFM system, with applying a dual height method, the distance between the probe tip and the sample surface can be accurately obtained by removing the influence of the electric field distribution on the sample surface. Since the electrostatic force is greatly influenced by the capacitance between the probe tip and the sample surface, a new approach for modeling and characterization of the distribution of capacitance between the probe tip with an arbitrary shape and the sample surface with a random topography by using the finite difference method (FDM) is proposed. The electrostatic forces calculated by the FDM method and the conventional sphere-plane model are compared to verify the validity of the FDM method. The frequency shift values measured by the experiment are also compared with the simulation results calculated by the FDM method. It has been demonstrated that the electrostatic force between arbitrary shapes of the probe tip and the sample surface can be well calculated by the FDM. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Modeling nationallicence Finite difference method nationallicence Scanning electrostatic force microscopy nationallicence Profile nationallicence Measurement nationallicence Jia Zhigang Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut Ito So Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut Hosobuchi Keiichiro Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut Goto Shigeaki Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut Shimizu Yuki Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut He Gaofa School of Mechanical and Power Engineering, Chongqing University of Science and Technology, 401331, Chongqing, China aut Gao Wei Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/9(2013-09-01), 1543-1549 2234-7593 14:9<1543 2013 14 12541 https://doi.org/10.1007/s12541-013-0208-6 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0208-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Jia Zhigang Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Ito So Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Hosobuchi Keiichiro Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Goto Shigeaki Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Shimizu Yuki Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- He Gaofa School of Mechanical and Power Engineering, Chongqing University of Science and Technology, 401331, Chongqing, China aut NATIONALLICENCE 700 1- Gao Wei Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/9(2013-09-01), 1543-1549 2234-7593 14:9<1543 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer