naa a22 4500 510822495 CHVBK 20180411083540.0 cr unu---uuuuu 180411e20130901xx s 000 0 eng 10.1007/s12541-013-0207-7 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0207-7 Surface profile measurement of internal micro-structures [Elektronische Daten] [Bin Xu, Yuki Shimizu, So Ito, Wei Gao] A measurement system is presented for surface profile measurements of micro-structures generated on internal cylindrical surfaces of workpieces. The main components of the measurement system are an air-bearing spindle to rotate the measured internal microstructures, an air-bearing displacement sensor with a diamond micro-stylus probe to scan the surface profile of the internal microstructures being measured and a vibration isolation table to reduce the disturbance of the measurement environment. The stability of the air-bearing displacement sensor with a diamond micro-stylus probe was experimentally investigated. Measurements of surface profile of internal micro-structures were also carried out while employing a newly-developed algorithm to correct errors caused by the tip radius of the diamond micro-stylus. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Air-bearing spindle nationallicence Air-bearing displacement sensor nationallicence Surface profile measurement nationallicence Internal micro-structures nationallicence Stylus tip radius correction nationallicence r stylus : tip radius of the employed micro-stylus nationallicence r 0 : radius of the selected reference circle of the measured internal micro-structures nationallicence r 1 : radius of the reference circle extracted from the raw data of measurement nationallicence d : distance between the origin of the air-bearing displacement sensor and the center of the spindle turntable nationallicence s i : raw data of the measured profile nationallicence si′ : data of the measured profile in which the zero offset is compensated nationallicence Xu Bin Department of Nanomechanics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, 980-8579, Sendai, Japan aut Shimizu Yuki Department of Nanomechanics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, 980-8579, Sendai, Japan aut Ito So Department of Nanomechanics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, 980-8579, Sendai, Japan aut Gao Wei Department of Nanomechanics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, 980-8579, Sendai, Japan aut International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/9(2013-09-01), 1535-1541 2234-7593 14:9<1535 2013 14 12541 https://doi.org/10.1007/s12541-013-0207-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0207-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Xu Bin Department of Nanomechanics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Shimizu Yuki Department of Nanomechanics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Ito So Department of Nanomechanics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Gao Wei Department of Nanomechanics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, 980-8579, Sendai, Japan aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/9(2013-09-01), 1535-1541 2234-7593 14:9<1535 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer