naa a22 4500 51082255X CHVBK 20180411083540.0 cr unu---uuuuu 180411e20130901xx s 000 0 eng 10.1007/s12541-013-0219-3 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0219-3 Construction and verification of a linear-rotary microstage with a millimeter-scale range [Elektronische Daten] [Yuxin Peng, So Ito, Yasumasa Sakurai, Yuki Shimizu, Wei Gao] This paper presents a second-generation linear-rotary (Z-θZ) micro-stage driven by impact friction. The micro-stage was constructed by miniaturizing a previously developed linear-rotary stage. The moving element of the micro-stage, which was a steel cylinder, could be actuated along and around the Z-axis in millimeter-scale range. The steel cylinder was supported by two driving units. Each unit consisted of a permanent magnet and two piezoelectric actuators (PZTs) for generating the impact friction motions in the Z- and θZ-directions. The size of the micro-stage was made to be 11.0 mm (L) × 11.0 mm (W) × 5.7 mm (H). For enhancement of the stage velocity, the transfer function of the micro-stage with the voltage applied to the PZT as the input and the PZT displacement as the output, was established. An improved waveform of the input voltage was then obtained based on the established transfer function for getting a triangular-shaped PZT displacement, which was an ideal waveform for the impact friction motion. The characteristics of the stage velocity before and after the improvement of the input voltage were verified and the effectiveness of the improved input voltage for enhancement of the stage velocity was confirmed. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Linear-rotary micro-stage nationallicence Impact friction drive nationallicence Piezoelectric actuator nationallicence Precision positioning nationallicence Drive Improved waveform nationallicence Peng Yuxin Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut Ito So Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut Sakurai Yasumasa Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut Shimizu Yuki Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut Gao Wei Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/9(2013-09-01), 1623-1628 2234-7593 14:9<1623 2013 14 12541 https://doi.org/10.1007/s12541-013-0219-3 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0219-3 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Peng Yuxin Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Ito So Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Sakurai Yasumasa Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Shimizu Yuki Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 700 1- Gao Wei Department of Nanomechanics, Tohoku University, 980-8579, Sendai, Japan aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/9(2013-09-01), 1623-1628 2234-7593 14:9<1623 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer