naa a22 4500 510822932 CHVBK 20180411083542.0 cr unu---uuuuu 180411e20131201xx s 000 0 eng 10.1007/s12541-013-0295-4 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0295-4 The fabrication of high-aspect-ratio cylindrical nano tool using ECM [Elektronische Daten] [Yufeng Wang, Ningsong Qu, Yongbin Zeng, Xiujuan Wu, Di Zhu] With the miniaturization of various types of components and devices, micro- and nanometer-scale tools are increasingly in demand. Electrochemical machining (ECM) is a well-established technique for the fabrication of micro tools and nano tips. This paper presents a machining method for the fabrication of a high-aspect-ratio cylindrical nano tool using liquid membrane ECM, in which a straight reciprocating motion is applied to the anodic electrode. The method is based on periodic machining of the anodic rod within the amplitude of the straight reciprocating motion. In this process, the machining rate within amplitude varies periodically, allowing nano tools with high aspect ratios to be obtained by the presented method. Experiments were conducted to verify the proposed method. The influences of applied voltage, electrolyte concentration, amplitude and velocity of the straight reciprocating motion on the fabrication of cylindrical nano-electrode were investigated. By using this method, nano-electrodes with average diameters of several hundred nanometers and aspect ratios up to 70 were successfully fabricated. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Nano tool nationallicence High-aspect-ratio nationallicence Liquid membrane nationallicence Straight reciprocating motion nationallicence Electrochemical Machining nationallicence Wang Yufeng Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut Qu Ningsong Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut Zeng Yongbin Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut Wu Xiujuan Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut Zhu Di Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/12(2013-12-01), 2179-2186 2234-7593 14:12<2179 2013 14 12541 https://doi.org/10.1007/s12541-013-0295-4 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0295-4 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wang Yufeng Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut NATIONALLICENCE 700 1- Qu Ningsong Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut NATIONALLICENCE 700 1- Zeng Yongbin Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut NATIONALLICENCE 700 1- Wu Xiujuan Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut NATIONALLICENCE 700 1- Zhu Di Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics & Astronautics, 210016, Nanjing, China aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/12(2013-12-01), 2179-2186 2234-7593 14:12<2179 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer