naa a22 4500 510823203 CHVBK 20180411083543.0 cr unu---uuuuu 180411e20130301xx s 000 0 eng 10.1007/s12541-013-0062-6 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0062-6 Development of precision stage with magnified displacement system using multi reflection of optical sensor [Elektronische Daten] [Yang Ha, Sang Lee, Seung Lee, Soo Choi, Deug Lee] For high-resolution positioning of a precision stage, conventional positioning systems require laser interferometers or capacitance displacement sensors to measure nanoscale displacements. These can be expensive and complicated. In this study, a new measuring system was developed using multi laser reflection and mechanical magnification of its displacement. The displacement of the stage was measured using a position-sensitive photodiode (PSPD), a laser diode (LD), a hinge-connected rotating mirror plate, and two reflection mirror plates. A beam from the laser diode was focused on the center of the rotating mirror. The beam was reflected onto one of the reflection mirrors, and underwent several reflections. The position variation of the reflected beam from the reflection mirrors was then measured by the PSPD. Using this magnified displacement system a measuring resolution of less than 5 nm was achieved. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Optical magnified displacement system nationallicence PSPD nationallicence Flexure hinge nationallicence Precision stage nationallicence θ i : the initial angle of the rotating mirror nationallicence θ x : the rotation angle induced by stage movement nationallicence θ r : the total rotation angle of the rotating mirror plate nationallicence w r : the distance from the reflected laser beam to the middle of the rotation mirror plate when the angles are θ r nationallicence w i : the distance from the reflected laser beam to the middle of the rotation mirror plate when the angles are θ i nationallicence ΔPSPD : the laser spot movement on the PSPD nationallicence Δ x : the displacement of the precision stage nationallicence Δ A : the intersection of the centerline nationallicence Δ B : the extended laser trace reflected from the rotation mirror for the respective angles θ x and θ i nationallicence L : the length of the rotating hinge nationallicence D : the distance between the two reflection mirrors nationallicence X : the initial displacement of the stage nationallicence N : the number of times the laser beam is reflected nationallicence R : Magnified ratio nationallicence Ha Yang Department of Mechanical & Precision Engineering, Pusan National University, 609-735, Busan, South Korea aut Lee Sang Department of Nano Fusion Technology, Pusan National University, 627-706, Miryang, South Korea aut Lee Seung Interdisciplinary Program in Innovative Manufacturing Engineering, Pusan National University, 609-735, Miryang, South Korea aut Choi Soo Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, 305-343, Daejeon, South Korea aut Lee Deug Department of Nano Mechatronics Engineering, Pusan National University, 609-735, Miryang, South Korea aut International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/3(2013-03-01), 461-466 2234-7593 14:3<461 2013 14 12541 https://doi.org/10.1007/s12541-013-0062-6 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0062-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ha Yang Department of Mechanical & Precision Engineering, Pusan National University, 609-735, Busan, South Korea aut NATIONALLICENCE 700 1- Lee Sang Department of Nano Fusion Technology, Pusan National University, 627-706, Miryang, South Korea aut NATIONALLICENCE 700 1- Lee Seung Interdisciplinary Program in Innovative Manufacturing Engineering, Pusan National University, 609-735, Miryang, South Korea aut NATIONALLICENCE 700 1- Choi Soo Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, 305-343, Daejeon, South Korea aut NATIONALLICENCE 700 1- Lee Deug Department of Nano Mechatronics Engineering, Pusan National University, 609-735, Miryang, South Korea aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/3(2013-03-01), 461-466 2234-7593 14:3<461 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer