naa a22 4500 51082353X CHVBK 20180411083545.0 cr unu---uuuuu 180411e20131001xx s 000 0 eng 10.1007/s12541-013-0230-8 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0230-8 A quartz-bar megasonic system for nano-pattern cleaning [Elektronische Daten] [Hyunse Kim, Yanglae Lee, Euisu Lim] A quartz-bar megasonic system for cleaning nano-particles with uniform acoustic pressures, was designed and manufactured. The impedance graph of the piezoelectric actuator used in the system was predicted using a finite element method (FEM); this gives the anti-resonance frequency of the piezoelectric actuator alone as 987 kHz, which is the same as the experimentally measured value. The impedance graph of the megasonic system was also analyzed. The predicted anti-resonance frequency of the system was 987 kHz, which agreed well with the measured frequency of 983 kHz. The acoustic pressure distributions of the developed system were examined using an acoustic pressure measurement system. The measured average acoustic pressure and its uniformity were compared with a commercially available product in terms of evaluating the system performance. The average acoustic pressure of the bar-type megasonic system was increased by 89%, while standard deviations of the bar-type megasonic system were decreased by 20%. This implies that the developed bar-type megasonic has an improved capability of particle removal efficiency (PRE) as well as better uniformity of the acoustic pressures. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Megasonic nationallicence Finite element method (FEM) nationallicence Nano-pattern cleaning nationallicence Kim Hyunse Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials, 171 Jang-Dong, Yuseong-Gu, 305-343, Daejeon, South Korea aut Lee Yanglae Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials, 171 Jang-Dong, Yuseong-Gu, 305-343, Daejeon, South Korea aut Lim Euisu Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials, 171 Jang-Dong, Yuseong-Gu, 305-343, Daejeon, South Korea aut International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/10(2013-10-01), 1713-1718 2234-7593 14:10<1713 2013 14 12541 https://doi.org/10.1007/s12541-013-0230-8 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0230-8 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Kim Hyunse Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials, 171 Jang-Dong, Yuseong-Gu, 305-343, Daejeon, South Korea aut NATIONALLICENCE 700 1- Lee Yanglae Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials, 171 Jang-Dong, Yuseong-Gu, 305-343, Daejeon, South Korea aut NATIONALLICENCE 700 1- Lim Euisu Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials, 171 Jang-Dong, Yuseong-Gu, 305-343, Daejeon, South Korea aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/10(2013-10-01), 1713-1718 2234-7593 14:10<1713 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer