naa a22 4500 510823580 CHVBK 20180411083545.0 cr unu---uuuuu 180411e20131001xx s 000 0 eng 10.1007/s12541-013-0246-0 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0246-0 Analysis of squareness measurement using a laser interferometer system [Elektronische Daten] [Dong-Mok Lee, Hoon-Hee Lee, Seung-Han Yang] Squareness measurements of the driving axes of a machine tool are very important in order to evaluate the performance of the machine. A laser interferometer measurement is one of the most reliable ways to measure squareness. However, a squareness measurement using a laser interferometer system with an optical square causes restrictions in the straightness interferometer setup, which results in the occurrence of Abbe's offset. The Abbe's offset combined with angular errors during the motion of an axis causes Abbe's error. In addition, difficulty in the optical square setup causes restrictions on other optics and limitations of the measurable range. We present mathematical approaches that can be used to eliminate Abbe's error and to estimate squareness over the full range by using the best fit of straightness data measured without an optical square. Experiments for squareness measurements of a threeaxis machine tool are conducted. The proposed techniques are used for squareness evaluation with the elimination of Abbe's error and also for squareness estimation for the full travel range. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Squareness measurement nationallicence Laser interferometer nationallicence Abbe's error nationallicence Representative line nationallicence Best fit nationallicence Optical square nationallicence a ij : Abbe's offset in i-direction of j-axis nationallicence e ij : Abbe's error in i-direction of j-axis nationallicence r ij : straightness data measured with Abbe's offset in i-direction of j-axis, i=x, y, z nationallicence j=x, y, z nationallicence m ij : straightness data with Abbe's error eliminated from r ij in idirection of j-axis, i=x, y, z nationallicence j=x, y, z nationallicence ɛ ij : angular error in i-direction of j-axis, i=x, y, z nationallicence j=x, y, z nationallicence s ij , s ij ′ : squareness of ij-plane for measurable and full travel range, respectively nationallicence δ ij : straightness error in i-direction of j-axis, i=x, y, z nationallicence j=x, y, z nationallicence α,β : inclination of representative line of measurement data from the X-axis and Y-axis, respectively nationallicence Δ α ,Δ β : difference in inclination of straightness representative lines for measurements with and without optical square at X-axis and Y-axis, respectively nationallicence α ′, β ′ : inclination of straightness representative line (best fit curve) from X-axis and Y-axis, respectively nationallicence Lee Dong-Mok Institute of Mechanical Engineering Technology, Kyungpook National University, 80 Daehak-ro, Buk-gu, 702-701, Daegu, Republic of Korea aut Lee Hoon-Hee School of Mechanical Engineering, Kyungpook National University, 80 Daehak-ro, 702-701, Buk-gu, Daegu, Republic of Korea aut Yang Seung-Han School of Mechanical Engineering, Kyungpook National University, 80 Daehak-ro, 702-701, Buk-gu, Daegu, Republic of Korea aut International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/10(2013-10-01), 1839-1846 2234-7593 14:10<1839 2013 14 12541 https://doi.org/10.1007/s12541-013-0246-0 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0246-0 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Lee Dong-Mok Institute of Mechanical Engineering Technology, Kyungpook National University, 80 Daehak-ro, Buk-gu, 702-701, Daegu, Republic of Korea aut NATIONALLICENCE 700 1- Lee Hoon-Hee School of Mechanical Engineering, Kyungpook National University, 80 Daehak-ro, 702-701, Buk-gu, Daegu, Republic of Korea aut NATIONALLICENCE 700 1- Yang Seung-Han School of Mechanical Engineering, Kyungpook National University, 80 Daehak-ro, 702-701, Buk-gu, Daegu, Republic of Korea aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/10(2013-10-01), 1839-1846 2234-7593 14:10<1839 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer