naa a22 4500 510823726 CHVBK 20180411083546.0 cr unu---uuuuu 180411e20130401xx s 000 0 eng 10.1007/s12541-013-0084-0 doi (NATIONALLICENCE)springer-10.1007/s12541-013-0084-0 Study on 3D characterized profile and point accuracies of ground micro-pyramid-structured Si surface [Elektronische Daten] [Jin Xie, Yong-Xian Lu, Xu-Ran Liu, Yan-Jun Lu] It is very difficult to evaluate 3D profile accuracy of micro-machined surface due to the 3D characterization of its measured point cloud. Hence, three ideal point cloud models, which are grid point model, slash profile model and horizontal profile model, were constructed to register 3D measured point cloud of micro-machined surface and evaluate the accuracies of characterized profile and points. First, #400 and #600 diamond wheel V-tips were employed to fabricate non-integrated and integrated micro-pyramid-structured surfaces with 173 µm in depth and 0.865 in aspect ratio in Computer Numerical Control (CNC) grinding system, respectively; then a white light interferometer was utilized to measure the micro-ground surfaces; finally, registration accuracy and registration efficiency were investigated with regard to characterized profile and point accuracies. The results show that registration accuracy increases and registration efficiency decreases with increasing model point number, but they have little relation with the posture of measured point cloud. Registration error may converge to micro-ground form error when model point number is larger than measured point number. Moreover, the slash profile and horizontal profile models may register characterized profile and point more precisely than grid point model. The slash profile model can produce the best registration accuracy and efficiency. It is confirmed that the micro-ground form errors are 23.8 µm and 7.9 µm, the characterized profile errors are 37.2 µm and 19.0 µm and the characterized peak errors are 51.2 µm and 34.1 µm for non-integrated surface and integrated surface, respectively. As a result, a #600 diamond grinding wheel may be used to perform a precision micro-grinding in CNC grinding system. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 Micro-structured surface nationallicence Micro-grinding nationallicence Characterized profile nationallicence Characterized point nationallicence ICP matching nationallicence Xie Jin School of Mechanical & Automotive Engineering, South China University of Technology, 510640, Guangzhou, China aut Lu Yong-Xian School of Mechanical & Automotive Engineering, South China University of Technology, 510640, Guangzhou, China aut Liu Xu-Ran School of Mechanical & Automotive Engineering, South China University of Technology, 510640, Guangzhou, China aut Lu Yan-Jun School of Mechanical & Automotive Engineering, South China University of Technology, 510640, Guangzhou, China aut International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/4(2013-04-01), 627-634 2234-7593 14:4<627 2013 14 12541 https://doi.org/10.1007/s12541-013-0084-0 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0084-0 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Xie Jin School of Mechanical & Automotive Engineering, South China University of Technology, 510640, Guangzhou, China aut NATIONALLICENCE 700 1- Lu Yong-Xian School of Mechanical & Automotive Engineering, South China University of Technology, 510640, Guangzhou, China aut NATIONALLICENCE 700 1- Liu Xu-Ran School of Mechanical & Automotive Engineering, South China University of Technology, 510640, Guangzhou, China aut NATIONALLICENCE 700 1- Lu Yan-Jun School of Mechanical & Automotive Engineering, South China University of Technology, 510640, Guangzhou, China aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Korean Society for Precision Engineering 14/4(2013-04-01), 627-634 2234-7593 14:4<627 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer