naa a22 4500 510823882 CHVBK 20180411083547.0 cr unu---uuuuu 180411e20130801xx s 000 0 eng 10.1007/s12541-013-0175-y doi (NATIONALLICENCE)springer-10.1007/s12541-013-0175-y Ultra-short laser patterning of thin-film CIGS solar cells through glass substrate [Elektronische Daten] [Tai-Wook Kim, Jeong-Yun Lee, Do-Hun Kim, Heui-Jae Pahk] A comparative analysis and a novel method involving a monolithic interconnection process (scribing) of creating thin film CIGS solar cells are presented based on experimental approaches and models. The boundaries of the delamination and ablation of molybdenum film in the P1 process of low-intensity picosecond (ps) laser irradiation through a substrate (substrate-side processing) are investigated. The observed ablation is explained in two steps based on the boundary formation observed and the deformation of the molybdenum layer resulting in the ablation of the delaminated layer. A novel idea of the P2 process through the substrate using a ps laser is then proposed and tested based on these explanations. The new P2 process can ablate nearly 2 microns of an absorber layer of a CIGS sample at a laser pulse energy of 5.3 μJ (with a 36 micron (1/e2) spot diameter) without signs of thermal effects while the conventional film-side processing for P2 requires 78 μJ and exhibits a typical laser induced heat-affected zone. Scanning electron microscope (SEM) and energy-dispersive X-ray spectroscopy (EDS) observations show the advantages of the new process, which can prevent melting and other heat effects on the absorber and molybdenum layers. Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg, 2013 CIGS nationallicence Laser scribing nationallicence P1 nationallicence P2 nationallicence Thin film solar cells nationallicence Ultra-short laser ablation nationallicence lt : heat diffusion length nationallicence De : the diameter of a laser spot (1/e2) nationallicence Dp : the diameter of ablation nationallicence I0 : the peak intensity of a laser spot nationallicence It : the threshold intensity at the edge of ablation or bulging nationallicence Kim Tai-Wook SNU Precision Co., Ltd., #201, 1629-2, Nakseongdae-dong, Kwanak-gu, 151-818, Seoul, South Korea aut Lee Jeong-Yun School of Mechanical and Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, 151-742, Seoul, South Korea aut Kim Do-Hun School of Mechanical and Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, 151-742, Seoul, South Korea aut Pahk Heui-Jae School of Mechanical and Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, 151-742, Seoul, South Korea aut International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/8(2013-08-01), 1287-1292 2234-7593 14:8<1287 2013 14 12541 https://doi.org/10.1007/s12541-013-0175-y text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12541-013-0175-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Kim Tai-Wook SNU Precision Co., Ltd., #201, 1629-2, Nakseongdae-dong, Kwanak-gu, 151-818, Seoul, South Korea aut NATIONALLICENCE 700 1- Lee Jeong-Yun School of Mechanical and Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, 151-742, Seoul, South Korea aut NATIONALLICENCE 700 1- Kim Do-Hun School of Mechanical and Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, 151-742, Seoul, South Korea aut NATIONALLICENCE 700 1- Pahk Heui-Jae School of Mechanical and Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, 151-742, Seoul, South Korea aut NATIONALLICENCE 773 0- International Journal of Precision Engineering and Manufacturing Springer Berlin Heidelberg 14/8(2013-08-01), 1287-1292 2234-7593 14:8<1287 2013 14 12541 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer