cam a22 4 4500 528772945 CHVBK 20201202100919.0 180922s2017 sz a m 00 0dger d urn:nbn:ch:bel-1608051 urn (SNL)991016811059703976 (SNL)991018073870803976 (NEBIS)011164862 (Sz)1936669-41snl_51 (Sz)vtls001936669 (Sz)001936669 (Sz)991018073870803976 Sz ger rda ger eng ger 621.3 23sdnb 620 550 23sdnb Wellerdieck Tobias 1989- (DE-588)1156305004 Verfasser aut Die lagerlose Pumpe für hohe Fluidtemperaturen vorgelegt von Tobias Wellerdieck Zürich 2017 xvii, 171 Seiten Illustrationen 21 cm Dissertation Nr. 24956 ETH Zürich, 2017 Literaturverzeichnis application/pdf Bearingless motors consist of a drive system with an integrated magnetic bearing and are used in centrifugal pumps for high purity applications. The machine is constructed without the use of a drive shaft, dynamic seals, and conventional mechanical bearings, since the rotor is levitated in a magnetic field. This allows for a wear-free operation and prevents the contamination of process fluids. Bearingless pumps are employed in wet chemical etching processes in the semiconductor industry, since low contamination is required due to the small structures on the wafer. The reaction speed of etching processes depends strongly on the temperature of the used chemicals. Therefore, high fluid temperatures are required in order to increase processing speed and yield. State of the art, commercially available bellows pumps are rated for 210 °C and bearingless pumps can be used for fluid temperatures of 90 °C with passive air cooling and 180 °C with active water cooling. This work is focused on increasing the admissible fluid temperature of a passively cooled bearingless pump to 250 °C. The number of components and, therefore, the complexity, the cost and the probability of failure are minimized by omitting an active cooling system. Challenges include the appropriate choice of materials, the construction of the components and the development of a sensing and closed-loop control scheme for high temperatures. The temperature distribution in the pump is calculated by using a thermal model, which is based on the analysis of the temperature-dependent performance of the bearingless pump, the internal losses and the heat transfer mechanisms. The choice of materials and the construction of the pump are based on the results of the thermal model. The motor utilizes a novel closed-loop, angle sensorless control scheme for bearingless machines. The rotor angle is obtained with a two-stage estimator consisting of a model-based low-speed and a back electromotive force-based high-speed angle observer. The controller enables closed loop operation at all rotational speeds and at standstill. Two prototypes of the bearingless high temperature pump were constructed and manufactured. Both machines were tested with fluid temperatures of up to 250 °C without failure of components. This proves that bearingless pumps can be employed successfully in extreme temperature applications. Deutscher Text mit deutscher und englischer Zusammenfassung MAGNETLAGER (MASCHINENELEMENTE) ger (ETHUDK)000029195 ethudk PUMPEN (MASCHINENBAU) ger (ETHUDK)000029013 ethudk Hochschulschrift (DE-588)4113937-9 gnd-content Hochschulschrift gnd-content sb 2018/10 621.3 zh snl-sb xehelv xediss 2020 620 550 snl ehelv u PUMPEN (MASCHINENBAU) ger 621.65 nebis E1 u MAGNETLAGER (MASCHINENELEMENTE) ger 621.822.3 nebis E1 u PUMPS AND PUMPING (MECHANICAL ENGINEERING) eng 621.65 nebis E1 u POMPES ET POMPAGE (INGÉNIERIE MÉCANIQUE) fre 621.65 nebis E1 u PALIERS MAGNÉTIQUES (ÉLÉMENTS DE MACHINES) fre 621.822.3 nebis E1 u MAGNETIC BEARINGS (MACHINE COMPONENTS) eng 621.822.3 nebis E1 Eidgenössische Technische Hochschule Zürich (DE-588)2023928-2 Grad-verleihende Institution dgg SNL NB001 NB999 - chb99 - https://opac.admin.ch/toc/toc1902037075.pdf Inhaltsverzeichnis BK020300 XK020000 XK020000 111 E01-20180430 SNL NB001 NB001 Nb 205546 NB10010 NEBIS E16 E16 RH Diss ETH 24596 SNL 100 1- Wellerdieck Tobias 1989- (DE-588)1156305004 Verfasser aut SNL 856 41 https://opac.admin.ch/toc/toc1902037075.pdf Inhaltsverzeichnis SNL 710 2- Eidgenössische Technische Hochschule Zürich (DE-588)2023928-2 Grad-verleihende Institution dgg SNL 100 1- Wellerdieck Tobias Verfasser aut SNL 856 40 http://hdl.handle.net/20.500.11850/257088 SNL 856 4- https://nbn-resolving.org/urn:nbn:ch:bel-1608051 SNL 856 42 http://www.e-helvetica.nb.admin.ch/directAccess?callnumber=bel-1608051 NEBIS 100 1- Wellerdieck Tobias 1989- (DE-588)1156305004 Verfasser aut NEBIS 700 1- Kolar Johann Walter 1959- (DE-588)1089304420 Akademischer Betreuer dgs NEBIS 700 1- Kennel Ralph 1955- (DE-588)110353676 Akademischer Betreuer dgs