Handbook of silicon based MEMS materials and technologies
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| 007 | cr |n |||||||| | ||
| 008 | 150401s2015 ne a sb 001 0 eng d | ||
| 010 | |a 2015937707 | ||
| 020 | |a 978-0-323-29965-7 (hbk.) | ||
| 020 | |a 0-323-29965-2 (hbk.) | ||
| 035 | |a (SERSOL)ssj0001777697 | ||
| 035 | |a (WaSeSS)ssj0001777697 | ||
| 040 | |a YDXCP |b eng |c YDXCP |d MYG |d OCLCQ |d OCLCF |d DEBSZ |d DLC |d WaSeSS |e rda | ||
| 050 | 0 | 0 | |a TK7875 |b .H36 2015 |
| 082 | 0 | 4 | |a 621.38152 |
| 245 | 0 | 0 | |a Handbook of silicon based MEMS materials and technologies |c edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos |
| 250 | |a Second edition. | ||
| 264 | 1 | |a Amsterdam |b William Anderew is an imprint of Elsevier |c 2015 | |
| 300 | |a 1 online resource (xxxvii, 787 pages) |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent/eng | ||
| 337 | |a computer |b c |2 rdamedia/eng | ||
| 338 | |a online resource |b cr |2 rdacarrier/eng | ||
| 490 | 0 | |a Micro & nano technologies series | |
| 504 | |a Includes bibliographical references and index. | ||
| 506 | |a Lizenzbedingungen können den Zugang einschränken. License restrictions may limit access. | ||
| 650 | 0 | |a Microelectromechanical systems | |
| 650 | 0 | |a Microelectromechanical systems |x Materials | |
| 650 | 0 | |a Silicon |x Electric properties | |
| 650 | 7 | |a Microelectromechanical systems |0 (OCoLC)fst01019745 |2 fast | |
| 650 | 7 | |a Microelectromechanical systems |x Materials |0 (OCoLC)fst01019748 |2 fast | |
| 650 | 7 | |a Silicon |x Electric properties |0 (OCoLC)fst01118637 |2 fast | |
| 700 | 1 | |a Markku |D Tilli |e editor | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/unibern/detail.action?docID=4003527 |z Uni Bern: Volltext |
| 898 | |a BK020053 |b XK020053 |c XK020000 | ||
| 909 | 4 | |f Ebook Central All Subscribed Titles | |
| 909 | 4 | |a E-Books von 360MarcUpdates | |
| 949 | |B IDSBB |F B405 |b B405 |c 405VT |x NELB4051809 | ||
| 950 | |B IDSBB |P 490 |E 1- |a Micro & nano technologies series | ||
| 950 | |B IDSBB |P 700 |E 1- |a Markku |D Tilli |e editor | ||
| 950 | |B IDSBB |P 856 |E 40 |u https://ebookcentral.proquest.com/lib/unibern/detail.action?docID=4003527 |z Uni Bern: Volltext | ||