cam a22 5 4500 528904523 CHVBK 20201014114609.0 m d cr |n |||||||| 150401s2015 ne a sb 001 0 eng d 2015937707 978-0-323-29965-7 (hbk.) 0-323-29965-2 (hbk.) (SERSOL)ssj0001777697 (WaSeSS)ssj0001777697 YDXCP eng YDXCP MYG OCLCQ OCLCF DEBSZ DLC WaSeSS rda TK7875 .H36 2015 621.38152 Handbook of silicon based MEMS materials and technologies edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos Second edition. Amsterdam William Anderew is an imprint of Elsevier 2015 1 online resource (xxxvii, 787 pages) illustrations text txt rdacontent/eng computer c rdamedia/eng online resource cr rdacarrier/eng Micro & nano technologies series Includes bibliographical references and index. Lizenzbedingungen können den Zugang einschränken. License restrictions may limit access. Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Microelectromechanical systems (OCoLC)fst01019745 fast Microelectromechanical systems Materials (OCoLC)fst01019748 fast Silicon Electric properties (OCoLC)fst01118637 fast Markku Tilli editor https://ebookcentral.proquest.com/lib/unibern/detail.action?docID=4003527 Uni Bern: Volltext BK020053 XK020053 XK020000 Ebook Central All Subscribed Titles E-Books von 360MarcUpdates IDSBB B405 B405 405VT NELB4051809 IDSBB 490 1- Micro & nano technologies series IDSBB 700 1- Markku Tilli editor IDSBB 856 40 https://ebookcentral.proquest.com/lib/unibern/detail.action?docID=4003527 Uni Bern: Volltext