Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
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| 100 | 1 | |a Bhattacharyya |D Bijoy | |
| 245 | 1 | 0 | |a Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |h [Elektronische Daten] |c Bijoy Bhattacharyya, Production Engineering Department, Jadavpur University, Kolkata, India |
| 260 | |a Oxford, UK |a Waltham, MA |b William Andrew |c c2015 | ||
| 300 | |a 1 online resource (xxv, 270 p.) |b ill | ||
| 490 | 0 | |a Micro & nano technologies | |
| 504 | |a Includes bibliographical references and index. | ||
| 506 | |a Lizenzbedingungen können den Zugang einschränken. License restrictions may limit access. | ||
| 650 | 7 | |a Microelectromechanical systems |0 (OCoLC)fst01019745 |2 fast | |
| 650 | 7 | |a Micromachining |0 (OCoLC)fst01019888 |2 fast | |
| 650 | 7 | |a Nanotechnology |0 (OCoLC)fst01032639 |2 fast | |
| 650 | 0 | |a Micromachining | |
| 650 | 0 | |a Nanotechnology | |
| 650 | 0 | |a Microelectromechanical systems | |
| 650 | 7 | |a FERTIGUNG IN DER ELEKTROTECHNIK, ELEKTRONIK, MIKRO-, NANOELEKTRONIK |x ger |0 (ETHUDK)000051815 |2 ethudk | |
| 650 | 7 | |a MIKROBEARBEITUNG (SPANENDE UMFORMUNG) |x ger |0 (ETHUDK)000059871 |2 ethudk | |
| 650 | 7 | |a MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK) |x ger |0 (ETHUDK)000048625 |2 ethudk | |
| 650 | 7 | |a NANOTECHNOLOGIE |x ger |0 (ETHUDK)000043821 |2 ethudk | |
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| 691 | 7 | |B u |a MIKROBEARBEITUNG (SPANENDE UMFORMUNG) |z ger |u 621.9.04*2 |2 nebis E1 | |
| 691 | 7 | |B u |a MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK) |z ger |u 621.3.04,2 |2 nebis E1 | |
| 691 | 7 | |B u |a NANOTECHNOLOGIE |z ger |u 620.22,6 |2 nebis E1 | |
| 691 | 7 | |B u |a FABRICATION EN ÉLECTROTECHNIQUE, ÉLECTRONIQUE, MICROÉLECTRONIQUE, NANOÉLECTRONIQUE |z fre |u 621.3,3%658.51 |2 nebis E1 | |
| 691 | 7 | |B u |a PRODUCTION IN ELECTRICAL ENGINEERING, ELECTRONICS, MICRO-, NANOELECTRONICS |z eng |u 621.3,3%658.51 |2 nebis E1 | |
| 691 | 7 | |B u |a MICROMACHINING (MACHINING) |z eng |u 621.9.04*2 |2 nebis E1 | |
| 691 | 7 | |B u |a MICRO-USINAGE (USINAGE) |z fre |u 621.9.04*2 |2 nebis E1 | |
| 691 | 7 | |B u |a COMPOSANTS MICRO-ÉLECTROMÉCANIQUES, MEMS (ÉLECTROTECHNIQUE) |z fre |u 621.3.04,2 |2 nebis E1 | |
| 691 | 7 | |B u |a MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING) |z eng |u 621.3.04,2 |2 nebis E1 | |
| 691 | 7 | |B u |a NANOTECHNOLOGIE |z fre |u 620.22,6 |2 nebis E1 | |
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