Analysis and design principles of MEMS devices
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| 100 | 1 | |a Bao |D Min-Hang | |
| 245 | 1 | 0 | |a Analysis and design principles of MEMS devices |h [Elektronische Daten] |c by Minhang Bao |
| 260 | |a Amsterdam |a Oxford |b Elsevier |c c2005 | ||
| 300 | |a 1 online resource (xii, 312 p.) |b ill | ||
| 504 | |a Includes bibliographical references and index. | ||
| 506 | |a Lizenzbedingungen können den Zugang einschränken. License restrictions may limit access. | ||
| 650 | 0 | |a Microtechnology | |
| 650 | 0 | |a Microelectromechanical systems | |
| 650 | 7 | |a MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK) |x ger |0 (ETHUDK)000048625 |2 ethudk | |
| 691 | 7 | |B u |a MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK) |z ger |u 621.3.04,2 |2 nebis E1 | |
| 691 | 7 | |B u |a COMPOSANTS MICRO-ÉLECTROMÉCANIQUES, MEMS (ÉLECTROTECHNIQUE) |z fre |u 621.3.04,2 |2 nebis E1 | |
| 691 | 7 | |B u |a MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING) |z eng |u 621.3.04,2 |2 nebis E1 | |
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