Gettering and defect engineering in semiconductor technology

GADEST'97 : proceedings of the 7th International Autumn Meeting, Spa, Belgium, Ocober 5-10, 1997

Verfasser / Beitragende:
ed.: C[or] Claeys ... [et al.]
Ort, Verlag, Jahr:
Zürich-Uetikon (Brandrain 6) : Scitec Publications, distribution: Scitec Publications [etc.], 1997
Beschreibung:
XV, 538 S. : Fig. ; 25 cm
Format:
Buch (Kongress)
ID: 531543269