cam a22 4500 53359314X CHVBK 20200407195719.0 951031s1995 sz a f00 0 eng d (SNL)991002646419703976 (Sz)58723-41snl_51 (Sz)vtls000058723 (Sz)000058723 Sz Sz From molecules to particles in silane plasmas A.A. Howling ... [et al.] Lausanne CRPP, [Centre de recherches en physique des plasmas], Ecole polytechnique fédérale 1995 [8] S. Fig. 30 cm txt rdacontent n rdamedia nc rdacarrier LRP 520/95 Submitted for publ. to "Journal of pure & applied chemistry" Invited plenary paper at the 12th International Symposium on Plasma Chemistry, Minneapolis, USA, August 21-25, 1995 Literaturverz. 1900049843 wne 533.9 snl local sb 1995/22 18 snl-sb Howling A.A. Alan A. Centre de recherches en physique des plasmas Lausanne (DE-588)816840-4 LRP 520/95 (Sz)000003943 SNL 490 1- LRP 520/95 SNL 700 1- Howling A.A. Alan A SNL 710 2- Centre de recherches en physique des plasmas Lausanne (DE-588)816840-4 SNL 830 -- LRP 520/95 (Sz)000003943 BK020000 XK020000 XK020000 SNL NB001 NB001 Pq 11489/520 NB10011