cam a22 4 4500 555317978 CHVBK 20201018111352.0 cr ||||||||||| 180807s2018 xxu o|||| 101 |eng| 978-1-5106-1576-2 electronic 978-1-5106-1575-5 print (OCoLC)1085683513 (NEBIS)011352853 SzZuIDS NEBIS ETH-BIB ger rda MOEMS and Miniaturized Systems Veranstaltung (17. 2018 San Francisco, Calif.) (DE-588)1177157055 MOEMS and Miniaturized Systems XVII 30-31 January 2018, San Francisco, California, United States Wibool Piyawattanametha, Yong-Hwa Park, Hans Zappe (editors) ; sponsored by SPIE ; cosponsored by Samsung Advanced Institute of Technology ; published by SPIE Bellingham, Washington SPIE [2018] 1 Online-Ressource Text txt rdacontent/ger Computermedien c rdamedia/ger Online-Ressource cr rdacarrier/ger Proceedings of SPIE. 5200- volume 10545 Includes bibliographical references and author index Konferenzschrift San Francisco, Calif 2018 gnd-content Wibool Piyawattanametha Herausgeber edt Park Yong-Hwa Herausgeber edt Zappe Hans P. 1961- (DE-588)143733044 Herausgeber edt SPIE (DE-588)10182148-7 Sponsor spn Herausgebendes Organ isb Samsŏng Chonghap Kisurwŏn (DE-588)1115145495 Sponsor spn http://sfx.ethz.ch/sfx_locater?sid=ALEPH:EBI01&genre=book&isbn=9781510615762 Online via SFX BK020853 XK020053 XK020000 EText nebis ED E01-Manuell nebis ER noalma ids I NEBIS E01 E01 EL NEBIS 111 2- MOEMS and Miniaturized Systems Veranstaltung (17 2018 San Francisco, Calif) (DE-588)1177157055 NEBIS 490 0- Proceedings of SPIE. 5200- volume 10545 NEBIS 700 1- Wibool Piyawattanametha Herausgeber edt NEBIS 700 1- Park Yong-Hwa Herausgeber edt NEBIS 700 1- Zappe Hans P. 1961- (DE-588)143733044 Herausgeber edt NEBIS 710 2- SPIE (DE-588)10182148-7 Sponsor spn Herausgebendes Organ isb NEBIS 710 2- Samsŏng Chonghap Kisurwŏn (DE-588)1115145495 Sponsor spn NEBIS 856 -- http://sfx.ethz.ch/sfx_locater?sid=ALEPH:EBI01&genre=book&isbn=9781510615762 Online via SFX SWISSBIB 368780899