caa a22 4500 605479321 CHVBK 20210128100409.0 cr unu---uuuuu 210128e20150201xx s 000 0 eng 10.1007/s10544-014-9909-6 doi (NATIONALLICENCE)springer-10.1007/s10544-014-9909-6 Impedance characterization, degradation, and in vitro biocompatibility for platinum electrodes on BioMEMS [Elektronische Daten] [Thomas Geninatti, Giacomo Bruno, Bernardo Barile, R. Hood, Marco Farina, Jeffrey Schmulen, Giancarlo Canavese, Alessandro Grattoni] Fine control of molecular transport through microfluidic systems can be obtained by modulation of an applied electrical field across channels with the use of electrodes. In BioMEMS designed for biological fluids and in vivo applications, electrodes must be biocompatible, biorobust and stable. In this work, the analysis and characterization of platinum (Pt) electrodes integrated on silicon substrates for biomedical applications are presented. Electrodes were incorporated on the surface of silicon chips by adhesion of laminated Pt foils or deposited at 30°, 45° or 90° angle by e-beam or physical vapor (sputtering) methods. Electrical and physical properties of the electrodes were quantified and evaluated using electrical impedance spectroscopy and modelling of the electrode-electrolyte interfaces. Electrode degradation in saline solution at pH7.4 was tested at room temperature and under accelerated conditions (90°C), both in the presence and absence of an applied electrical potential. Degradation was quantified using atomic force microscopy (AFM) and inductively coupled plasma mass spectroscopy (ICP-MS). Biocompatibility was assessed by MTT proliferation assay with human dermal fibroblasts. Results demonstrated that the deposited electrodes were biocompatible with negligible material degradation and exhibited electrochemical behavior similar to Pt foils, especially for e-beam deposited electrodes. Finally, Pt electrodes e-beam deposited on silicon nanofabricated nanochannel membranes were evaluated for controlled drug delivery applications. By tuning a low applied electrical potential (<1.5 VDC) to the electrodes, temporal modulation of the dendritic fullerene 1 (DF-1) release from a source reservoir was successfully achieved as a proof of concept, highlighting the potential of deposited electrodes in biomedical applications. Springer Science+Business Media New York, 2015 Implantable electrodes nationallicence E-beam deposition nationallicence Sputter deposition nationallicence Nanochannel membranes nationallicence Drug delivery nationallicence Geninatti Thomas Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut Bruno Giacomo Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut Barile Bernardo Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut Hood R. Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut Farina Marco Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut Schmulen Jeffrey Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut Canavese Giancarlo IIT - Italian Institute of Technology, Center for Space Human Robotics, Corso Trento 21, 10129, Tutin, Italy aut Grattoni Alessandro Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut Biomedical Microdevices Springer US; http://www.springer-ny.com 17/1(2015-02-01), 1-11 1387-2176 17:1<1 2015 17 10544 https://doi.org/10.1007/s10544-014-9909-6 text/html Onlinezugriff via DOI BK010053 XK010053 XK010000 Metadata rights reserved Springer special CC-BY-NC licence nationallicence 1 research-article jats NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE 856 40 https://doi.org/10.1007/s10544-014-9909-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Geninatti Thomas Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut NATIONALLICENCE 700 1- Bruno Giacomo Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut NATIONALLICENCE 700 1- Barile Bernardo Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut NATIONALLICENCE 700 1- Hood R. Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut NATIONALLICENCE 700 1- Farina Marco Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut NATIONALLICENCE 700 1- Schmulen Jeffrey Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut NATIONALLICENCE 700 1- Canavese Giancarlo IIT - Italian Institute of Technology, Center for Space Human Robotics, Corso Trento 21, 10129, Tutin, Italy aut NATIONALLICENCE 700 1- Grattoni Alessandro Houston Methodist Research Institute (HMRI), 6670 Bertner Avenue, 77030, Houston, TX, USA aut NATIONALLICENCE 773 0- Biomedical Microdevices Springer US; http://www.springer-ny.com 17/1(2015-02-01), 1-11 1387-2176 17:1<1 2015 17 10544