caa a22 4500 605479747 CHVBK 20210128100411.0 cr unu---uuuuu 210128e20150601xx s 000 0 eng 10.1007/s10544-015-9952-y doi (NATIONALLICENCE)springer-10.1007/s10544-015-9952-y Ultrananocrystalline diamond-CMOS device integration route for high acuity retinal prostheses [Elektronische Daten] [A. Ahnood, M. Escudie, R. Cicione, C. Abeyrathne, K. Ganesan, K. Fox, D. Garrett, A. Stacey, N. Apollo, S. Lichter, C. Thomas, N. Tran, H. Meffin, S. Prawer] High density electrodes are a new frontier for biomedical implants. Increasing the density and the number of electrodes used for the stimulation of retinal ganglion cells is one possible strategy for enhancing the quality of vision experienced by patients using retinal prostheses. The present work presents an integration strategy for a diamond based, high density, stimulating electrode array with a purpose built application specific integrated circuit (ASIC). The strategy is centered on flip-chip bonding of indium bumps to create high count and density vertical interconnects between the stimulator ASIC and an array of diamond neural stimulating electrodes. The use of polydimethylsiloxane (PDMS) housing prevents cross-contamination of the biocompatible diamond electrode with non-biocompatible materials, such as indium, used in the microfabrication process. Micro-imprint lithography allowed edge-to-edge micro-scale pattering of the indium bumps on non-coplanar substrates that have a form factor that can conform to body organs and thus are ideally suited for biomedical applications. Furthermore, micro-imprint lithography ensures the compatibility of lithography with the silicon ASIC and aluminum contact pads. Although this work focuses on 256 stimulating diamond electrode arrays with a pitch of 150μm, the use of indium bump bonding technology and vertical interconnects facilitates implants with tens of thousands electrodes with a pitch as low as 10μm, thus ensuring validity of the strategy for future high acuity retinal prostheses, and bionic implants in general. Springer Science+Business Media New York, 2015 Microelectrode array nationallicence Microelectrode array-CMOS integration nationallicence High acuity retinal prostheses nationallicence 3-Dimensional microfabrication nationallicence Ahnood A. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Escudie M. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Cicione R. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Abeyrathne C. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Ganesan K. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Fox K. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Garrett D. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Stacey A. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Apollo N. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Lichter S. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Thomas C. Melbourne Dental School, University of Melbourne, 3002, Parkville, VIC, Australia aut Tran N. Centre for Neural Engineering, Melbourne School of Engineering, The University of Melbourne, 3010, Parkville, VIC, Australia aut Meffin H. National Vision Research Institute, Australian College of Optometry, Centre for Integrative Brain Function, Department of Optometry and Vision Science, University of Melbourne, 3010, Parkville, VIC, Australia aut Prawer S. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut Biomedical Microdevices Springer US; http://www.springer-ny.com 17/3(2015-06-01), 1-11 1387-2176 17:3<1 2015 17 10544 https://doi.org/10.1007/s10544-015-9952-y text/html Onlinezugriff via DOI BK010053 XK010053 XK010000 Metadata rights reserved Springer special CC-BY-NC licence nationallicence 1 research-article jats NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE 856 40 https://doi.org/10.1007/s10544-015-9952-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ahnood A. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Escudie M. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Cicione R. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Abeyrathne C. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Ganesan K. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Fox K. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Garrett D. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Stacey A. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Apollo N. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Lichter S. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Thomas C. Melbourne Dental School, University of Melbourne, 3002, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Tran N. Centre for Neural Engineering, Melbourne School of Engineering, The University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Meffin H. National Vision Research Institute, Australian College of Optometry, Centre for Integrative Brain Function, Department of Optometry and Vision Science, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 700 1- Prawer S. School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia aut NATIONALLICENCE 773 0- Biomedical Microdevices Springer US; http://www.springer-ny.com 17/3(2015-06-01), 1-11 1387-2176 17:3<1 2015 17 10544