On determination of the fluctuation sensitivity limit of the induction method for the measurement of surface roughness

Verfasser / Beitragende:
[V. Troyan, V. Yakovlev, V. Loginov, P. Borisyuk]
Ort, Verlag, Jahr:
2015
Enthalten in:
Colloid Journal, 77/1(2015-01-01), 115-118
Format:
Artikel (online)
ID: 605489270
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024 7 0 |a 10.1134/S1061933X15010184  |2 doi 
035 |a (NATIONALLICENCE)springer-10.1134/S1061933X15010184 
245 0 0 |a On determination of the fluctuation sensitivity limit of the induction method for the measurement of surface roughness  |h [Elektronische Daten]  |c [V. Troyan, V. Yakovlev, V. Loginov, P. Borisyuk] 
520 3 |a The fluctuation sensitivity limit of the induction method for the measurement of surface roughness has been determined. It has been shown that, for a profilograph used in this work, the minimum value of magnetic induction resulting from current thermal fluctuations is equal to 3 × 10−7 G. According to the experimental data, a change in the surface relief height by 2 nm varies the magnetic induction by 2 × 10−6 G, i.e., by a value exceeding the value determined for the thermal fluctuations by an order of magnitude. Hence, the design of the differential inductive sensor proposed for the profilograph can be used to measure the surface roughness on the order of several fractions of a nanometer. 
540 |a Pleiades Publishing, Ltd., 2015 
700 1 |a Troyan  |D V.  |u National Research Nuclear University MEPhI, Kashirskoe sh. 31, 115409, Moscow, Russia  |4 aut 
700 1 |a Yakovlev  |D V.  |u National Research Nuclear University MEPhI, Kashirskoe sh. 31, 115409, Moscow, Russia  |4 aut 
700 1 |a Loginov  |D V.  |u National Research Nuclear University MEPhI, Kashirskoe sh. 31, 115409, Moscow, Russia  |4 aut 
700 1 |a Borisyuk  |D P.  |u National Research Nuclear University MEPhI, Kashirskoe sh. 31, 115409, Moscow, Russia  |4 aut 
773 0 |t Colloid Journal  |d Pleiades Publishing  |g 77/1(2015-01-01), 115-118  |x 1061-933X  |q 77:1<115  |1 2015  |2 77  |o 10595 
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950 |B NATIONALLICENCE  |P 700  |E 1-  |a Troyan  |D V.  |u National Research Nuclear University MEPhI, Kashirskoe sh. 31, 115409, Moscow, Russia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Yakovlev  |D V.  |u National Research Nuclear University MEPhI, Kashirskoe sh. 31, 115409, Moscow, Russia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Loginov  |D V.  |u National Research Nuclear University MEPhI, Kashirskoe sh. 31, 115409, Moscow, Russia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Borisyuk  |D P.  |u National Research Nuclear University MEPhI, Kashirskoe sh. 31, 115409, Moscow, Russia  |4 aut 
950 |B NATIONALLICENCE  |P 773  |E 0-  |t Colloid Journal  |d Pleiades Publishing  |g 77/1(2015-01-01), 115-118  |x 1061-933X  |q 77:1<115  |1 2015  |2 77  |o 10595