caa a22 4500 606173048 CHVBK 20210128100731.0 cr unu---uuuuu 210128e20151201xx s 000 0 eng 10.1007/s10921-015-0316-6 doi (NATIONALLICENCE)springer-10.1007/s10921-015-0316-6 Inversion of Elastic Constants of Anisotropic (100) Silicon Based on Surface Wave Velocity by Acoustic Microscopy Using Particle Swarm-Based-Simulated Annealing Optimization [Elektronische Daten] [Guorong Song, Guangfu Hong, Yan Lu, Yuyang Xu, Dengqian Qin, Bin Wu, Cunfu He] In this paper, a new inversion model of elastic constants of anisotropic (100) silicon is established by inducing the hybrid particle swarm optimization-based-simulated annealing optimization. Theoretical analysis on the surface acoustic wave (SAW) velocities of silicon has been carried out to construct the novel objective error function. The SAW velocities along different azimuthal angles are obtained by the V(f,z) analysis based on a lens-less line-focus acoustic microscopy. And the inversed results agree well with the reported data, which proves that this method shows high accuracy and strong reliability for the inversion of elastic constants of anisotropic materials. Springer Science+Business Media New York, 2015 Anisotropic (100) silicon nationallicence SAW velocities nationallicence PSO-b-SA nationallicence Elastic constants nationallicence Song Guorong College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut Hong Guangfu College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut Lu Yan College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut Xu Yuyang College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut Qin Dengqian College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut Wu Bin College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut He Cunfu College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut Journal of Nondestructive Evaluation Springer US; http://www.springer-ny.com 34/4(2015-12-01), 1-10 0195-9298 34:4<1 2015 34 10921 https://doi.org/10.1007/s10921-015-0316-6 text/html Onlinezugriff via DOI BK010053 XK010053 XK010000 Metadata rights reserved Springer special CC-BY-NC licence nationallicence 1 research-article jats NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE 856 40 https://doi.org/10.1007/s10921-015-0316-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Song Guorong College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut NATIONALLICENCE 700 1- Hong Guangfu College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut NATIONALLICENCE 700 1- Lu Yan College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut NATIONALLICENCE 700 1- Xu Yuyang College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut NATIONALLICENCE 700 1- Qin Dengqian College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut NATIONALLICENCE 700 1- Wu Bin College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut NATIONALLICENCE 700 1- He Cunfu College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China aut NATIONALLICENCE 773 0- Journal of Nondestructive Evaluation Springer US; http://www.springer-ny.com 34/4(2015-12-01), 1-10 0195-9298 34:4<1 2015 34 10921