caa a22 4500 606189025 CHVBK 20210128100848.0 cr unu---uuuuu 210128e20150701xx s 000 0 eng 10.1007/s10891-015-1277-4 doi (NATIONALLICENCE)springer-10.1007/s10891-015-1277-4 Production of Amorphous and Nanocrystalline Silicon Films by the Hot-Wire Activation Method [Elektronische Daten] [M. Andreev, A. Rebrov, A. Safonov, N. Timoshenko, K. Kubrak, V. Sulyaeva] Thin films of amorphous silicon with inclusions of a nanocrystalline silicon phase have been obtained by the method of gas-phase chemical deposition with hot-wire activation of the precursor. The influence of the gas pressure and of the hydrogen-monosilane ratio on the rate of growth and the degree of crystallinity of the deposited silicon has been investigated. Characteristic values of the synthesis parameters for obtaining silicon films of various degrees of crystallinity have been established. Springer Science+Business Media New York, 2015 gas-phase chemical deposition with hot-wire activation nationallicence thin silicon films nationallicence amorphous silicon nationallicence nanocrystalline silicon nationallicence Andreev M. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut Rebrov A. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut Safonov A. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut Timoshenko N. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut Kubrak K. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut Sulyaeva V. A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, 3 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut Journal of Engineering Physics and Thermophysics Springer US; http://www.springer-ny.com 88/4(2015-07-01), 1003-1007 1062-0125 88:4<1003 2015 88 10891 https://doi.org/10.1007/s10891-015-1277-4 text/html Onlinezugriff via DOI BK010053 XK010053 XK010000 Metadata rights reserved Springer special CC-BY-NC licence nationallicence 1 research-article jats NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE 856 40 https://doi.org/10.1007/s10891-015-1277-4 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Andreev M. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut NATIONALLICENCE 700 1- Rebrov A. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut NATIONALLICENCE 700 1- Safonov A. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut NATIONALLICENCE 700 1- Timoshenko N. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut NATIONALLICENCE 700 1- Kubrak K. S. S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut NATIONALLICENCE 700 1- Sulyaeva V. A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, 3 Acad. Lavrentiev Ave., 630090, Novosibirsk, Russia aut NATIONALLICENCE 773 0- Journal of Engineering Physics and Thermophysics Springer US; http://www.springer-ny.com 88/4(2015-07-01), 1003-1007 1062-0125 88:4<1003 2015 88 10891