caa a22 4500 606189793 CHVBK 20210128100852.0 cr unu---uuuuu 210128e20150301xx s 000 0 eng 10.1007/s10891-015-1200-z doi (NATIONALLICENCE)springer-10.1007/s10891-015-1200-z Influence of Conditions Employed in Application of Ti-Zr-Si-N Nanostructured Coatings on their Composition, Structure, and Tribomechanical Properties [Elektronische Daten] [F. Komarov, V. Pil'ko, I. Klimovich] Nanostructured coatings of thickness from 1.5 to 2 μm are applied to Ar+ ions-prepurifi ed stainless steel substrates by means of reactive magnetron sputtering of composite targets with the content of Ti-Zr-Si components 56, 36, 8 at.% and 36, 56, 8 at.%, respectively. Using the methods of Rutherford back scattering and transmission electron microscopy, we studied the structure of the coatings obtained, their phase composition, and the distribution of components over the depth of coatings. The microhardness of coatings was measured and their basic tribomechanical characteristics were investigated. The dependence of the composition and properties of coatings on the conditions of their application has been examined. The optimum regimes of application of coatings with high tribomechanical properties that ensure microhardness of coating of 31 GPa and double decrease in the friction coeffi cient have been determined. Springer Science+Business Media New York, 2015 friction nationallicence wear nationallicence coating nationallicence magnetron sputtering nationallicence Komarov F. A. N. Sevchenko Scientifi c-Research Institute of Applied Physical Problems, 7 Kurchatov Str, 220045, Minsk, Belarus aut Pil'ko V. A. N. Sevchenko Scientifi c-Research Institute of Applied Physical Problems, 7 Kurchatov Str, 220045, Minsk, Belarus aut Klimovich I. A. N. Sevchenko Scientifi c-Research Institute of Applied Physical Problems, 7 Kurchatov Str, 220045, Minsk, Belarus aut Journal of Engineering Physics and Thermophysics Springer US; http://www.springer-ny.com 88/2(2015-03-01), 358-363 1062-0125 88:2<358 2015 88 10891 https://doi.org/10.1007/s10891-015-1200-z text/html Onlinezugriff via DOI BK010053 XK010053 XK010000 Metadata rights reserved Springer special CC-BY-NC licence nationallicence 1 research-article jats NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE 856 40 https://doi.org/10.1007/s10891-015-1200-z text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Komarov F. A. N. Sevchenko Scientifi c-Research Institute of Applied Physical Problems, 7 Kurchatov Str, 220045, Minsk, Belarus aut NATIONALLICENCE 700 1- Pil'ko V. A. N. Sevchenko Scientifi c-Research Institute of Applied Physical Problems, 7 Kurchatov Str, 220045, Minsk, Belarus aut NATIONALLICENCE 700 1- Klimovich I. A. N. Sevchenko Scientifi c-Research Institute of Applied Physical Problems, 7 Kurchatov Str, 220045, Minsk, Belarus aut NATIONALLICENCE 773 0- Journal of Engineering Physics and Thermophysics Springer US; http://www.springer-ny.com 88/2(2015-03-01), 358-363 1062-0125 88:2<358 2015 88 10891