caa a22 4500 606209816 CHVBK 20210128101030.0 cr unu---uuuuu 210128e20151201xx s 000 0 eng 10.1007/s11220-015-0118-z doi (NATIONALLICENCE)springer-10.1007/s11220-015-0118-z RF MEMS Component for Tunable BAN Front-End [Elektronische Daten] [Huiliang Liu, Ling Li, Zewen Liu] A RF micrelectromechanical-system variable capacitor with Non-Planar Up-plate and Side Leverage Electrode structure is proposed to achieve a large tuning ratio and excellent linearity for tunable BAN front-end application. The proposed variable capacitor was modeled and simulated using CoventorWare. The result shows the tuning ratio of the capacitor is 400%. An impedance matching prototype model with the proposed capacitors is modeled and simulated using ADS software. The variable capacitor and matching network are realized using surface micromachining process and the fabrication results are demonstrated. Springer Science+Business Media New York, 2015 Body area network nationallicence IEEE 802.15.6 nationallicence Radio frequency micro-electro-mechanical systems nationallicence Tunable component nationallicence Liu Huiliang Institute of Microelectronics, Tsinghua University, 100084, Beijing, China aut Li Ling Institute of Microelectronics, Tsinghua University, 100084, Beijing, China aut Liu Zewen Institute of Microelectronics, Tsinghua University, 100084, Beijing, China aut Sensing and Imaging Springer US; http://www.springer-ny.com 16/1(2015-12-01), 1-7 1557-2064 16:1<1 2015 16 11220 https://doi.org/10.1007/s11220-015-0118-z text/html Onlinezugriff via DOI BK010053 XK010053 XK010000 Metadata rights reserved Springer special CC-BY-NC licence nationallicence 1 research-article jats NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE 856 40 https://doi.org/10.1007/s11220-015-0118-z text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Liu Huiliang Institute of Microelectronics, Tsinghua University, 100084, Beijing, China aut NATIONALLICENCE 700 1- Li Ling Institute of Microelectronics, Tsinghua University, 100084, Beijing, China aut NATIONALLICENCE 700 1- Liu Zewen Institute of Microelectronics, Tsinghua University, 100084, Beijing, China aut NATIONALLICENCE 773 0- Sensing and Imaging Springer US; http://www.springer-ny.com 16/1(2015-12-01), 1-7 1557-2064 16:1<1 2015 16 11220