caa a22 4500 606209867 CHVBK 20210128101030.0 cr unu---uuuuu 210128e20151201xx s 000 0 eng 10.1007/s11220-015-0110-7 doi (NATIONALLICENCE)springer-10.1007/s11220-015-0110-7 A Novel Micro-cantilever Based Angular Speed Sensor Controlled Piezoelectrically and Tuned by Electrostatic Actuators [Elektronische Daten] [A. Shah-Mohammadi-Azar, R. Shabani, G. Rezazadeh] In this paper a novel sensor is proposed to measure rotational shafts speed. The sensor is composed of a micro-cantilever, with a piezoelectric actuator layer on the upper surface and a sensor layer on the lower surface. The sensor is attached to the shaft while the deflection of the micro-cantilever, due to centrifugal force of the rotating shaft, is actively controlled. Therefore the sensor deflection is suppressed and the controller output or the piezoelectric actuating voltage is employed to measure the angular speed of the shaft (Force balance technique). The micro-cantilever is symmetrically located between two electrodes giving it a wider operating range and also increasing its sensitivity. Imposing different electrostatic bias voltages alters the equivalent stiffness of the structure and consequently affects the micro-beam deflections and the controller outputs. Simulation results reveal that for lower velocities the resolution increases by increasing the bias voltages. It is shown that decreasing the micro-beam length increases the measurable velocity range and conversely decreasing the electrodes gap decreases the maximum measurable speed. Springer Science+Business Media New York, 2015 Angular speed sensor nationallicence Centrifugal force nationallicence Piezoelectric nationallicence Micro-beam nationallicence Electrostatic actuation nationallicence Shah-Mohammadi-Azar A. Mechanical Engineering Department, Urmia University, Urmia, Iran aut Shabani R. Mechanical Engineering Department, Urmia University, Urmia, Iran aut Rezazadeh G. Mechanical Engineering Department, Urmia University, Urmia, Iran aut Sensing and Imaging Springer US; http://www.springer-ny.com 16/1(2015-12-01), 1-14 1557-2064 16:1<1 2015 16 11220 https://doi.org/10.1007/s11220-015-0110-7 text/html Onlinezugriff via DOI BK010053 XK010053 XK010000 Metadata rights reserved Springer special CC-BY-NC licence nationallicence 1 research-article jats NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE 856 40 https://doi.org/10.1007/s11220-015-0110-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Shah-Mohammadi-Azar A. Mechanical Engineering Department, Urmia University, Urmia, Iran aut NATIONALLICENCE 700 1- Shabani R. Mechanical Engineering Department, Urmia University, Urmia, Iran aut NATIONALLICENCE 700 1- Rezazadeh G. Mechanical Engineering Department, Urmia University, Urmia, Iran aut NATIONALLICENCE 773 0- Sensing and Imaging Springer US; http://www.springer-ny.com 16/1(2015-12-01), 1-14 1557-2064 16:1<1 2015 16 11220