caa a22 4500 606209883 CHVBK 20210128101030.0 cr unu---uuuuu 210128e20151201xx s 000 0 eng 10.1007/s11220-015-0108-1 doi (NATIONALLICENCE)springer-10.1007/s11220-015-0108-1 Super Sensitive Mass Detection in Nonlinear Regime [Elektronische Daten] [Saber Azizi, Iman Ahmadian, Cetin Cetinkaya, Ghader Rezazadeh] Nonlinear dynamics of a clamped-clamped micro-beam exposed to a two sided electrostatic actuation is investigated to determine super sensitive regions for mass detection. The objective is to investigate the sensitivity of the frequency spectrum of various regions in the phase space to the added mass and force the system to operate in its super sensitive regions by applying an appropriate pulse to its control electrodes. The electrostatic actuation in the top electrode is a combination of a DC, AC and a pulse voltage, the excitation on the lower electrode is only a DC and a pulse voltage. The governing equation of the motion, derived using the Hamiltonian principle, is discretized to an equivalent single-degree of freedom system using the Galerkin method. Depending on the applied electrostatic voltage to the micro-beam, it is demonstrated that the number and types of equilibrium points of the system can be modified. In this study, the level of the DC electrostatic voltage is chosen such a way that the system has three equilibrium points including two centers and a saddle node where the homoclinic orbit originates. According to the reported results, the mass sensing sensitivity depends on the operating orbit; some orbits exhibit considerably higher mass detection sensitivity to the added mass compared to that of a typical quartz crystal micro balance instrument. Springer Science+Business Media New York, 2015 MEMS nationallicence Nonlinear dynamics nationallicence Mass sensing nationallicence Frequency shift nationallicence Electro static actuation nationallicence Azizi Saber Urmia University of Technology, Urmia, Iran aut Ahmadian Iman Mechanical Engineering, New Jersey Institute of Technology, University Heights Newark, 07102, Newark, NJ, USA aut Cetinkaya Cetin Clarkson University, Potsdam, NY, USA aut Rezazadeh Ghader Mechanical Engineering, Urmia University, Urmia, Iran aut Sensing and Imaging Springer US; http://www.springer-ny.com 16/1(2015-12-01), 1-15 1557-2064 16:1<1 2015 16 11220 https://doi.org/10.1007/s11220-015-0108-1 text/html Onlinezugriff via DOI BK010053 XK010053 XK010000 Metadata rights reserved Springer special CC-BY-NC licence nationallicence 1 research-article jats NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE 856 40 https://doi.org/10.1007/s11220-015-0108-1 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Azizi Saber Urmia University of Technology, Urmia, Iran aut NATIONALLICENCE 700 1- Ahmadian Iman Mechanical Engineering, New Jersey Institute of Technology, University Heights Newark, 07102, Newark, NJ, USA aut NATIONALLICENCE 700 1- Cetinkaya Cetin Clarkson University, Potsdam, NY, USA aut NATIONALLICENCE 700 1- Rezazadeh Ghader Mechanical Engineering, Urmia University, Urmia, Iran aut NATIONALLICENCE 773 0- Sensing and Imaging Springer US; http://www.springer-ny.com 16/1(2015-12-01), 1-15 1557-2064 16:1<1 2015 16 11220