Effect of CH4 partial pressure on the microstructure and mechanical properties of magnetron sputtered TiC films

Authors / Contributors:
[Nan Shao, Lan Feng, Fanghua Mei, Geyang Li]
Place, publisher, year:
2004
Contained in:
Journal of Materials Science, 39/16-17(2004-08-01), 5533-5535
Format:
Article (online)
ID: 46633303X