Ultrananocrystalline diamond-CMOS device integration route for high acuity retinal prostheses

Verfasser / Beitragende:
[A. Ahnood, M. Escudie, R. Cicione, C. Abeyrathne, K. Ganesan, K. Fox, D. Garrett, A. Stacey, N. Apollo, S. Lichter, C. Thomas, N. Tran, H. Meffin, S. Prawer]
Ort, Verlag, Jahr:
2015
Enthalten in:
Biomedical Microdevices, 17/3(2015-06-01), 1-11
Format:
Artikel (online)
ID: 605479747
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024 7 0 |a 10.1007/s10544-015-9952-y  |2 doi 
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245 0 0 |a Ultrananocrystalline diamond-CMOS device integration route for high acuity retinal prostheses  |h [Elektronische Daten]  |c [A. Ahnood, M. Escudie, R. Cicione, C. Abeyrathne, K. Ganesan, K. Fox, D. Garrett, A. Stacey, N. Apollo, S. Lichter, C. Thomas, N. Tran, H. Meffin, S. Prawer] 
520 3 |a High density electrodes are a new frontier for biomedical implants. Increasing the density and the number of electrodes used for the stimulation of retinal ganglion cells is one possible strategy for enhancing the quality of vision experienced by patients using retinal prostheses. The present work presents an integration strategy for a diamond based, high density, stimulating electrode array with a purpose built application specific integrated circuit (ASIC). The strategy is centered on flip-chip bonding of indium bumps to create high count and density vertical interconnects between the stimulator ASIC and an array of diamond neural stimulating electrodes. The use of polydimethylsiloxane (PDMS) housing prevents cross-contamination of the biocompatible diamond electrode with non-biocompatible materials, such as indium, used in the microfabrication process. Micro-imprint lithography allowed edge-to-edge micro-scale pattering of the indium bumps on non-coplanar substrates that have a form factor that can conform to body organs and thus are ideally suited for biomedical applications. Furthermore, micro-imprint lithography ensures the compatibility of lithography with the silicon ASIC and aluminum contact pads. Although this work focuses on 256 stimulating diamond electrode arrays with a pitch of 150μm, the use of indium bump bonding technology and vertical interconnects facilitates implants with tens of thousands electrodes with a pitch as low as 10μm, thus ensuring validity of the strategy for future high acuity retinal prostheses, and bionic implants in general. 
540 |a Springer Science+Business Media New York, 2015 
690 7 |a Microelectrode array  |2 nationallicence 
690 7 |a Microelectrode array-CMOS integration  |2 nationallicence 
690 7 |a High acuity retinal prostheses  |2 nationallicence 
690 7 |a 3-Dimensional microfabrication  |2 nationallicence 
700 1 |a Ahnood  |D A.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Escudie  |D M.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Cicione  |D R.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Abeyrathne  |D C.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Ganesan  |D K.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Fox  |D K.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Garrett  |D D.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Stacey  |D A.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Apollo  |D N.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Lichter  |D S.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Thomas  |D C.  |u Melbourne Dental School, University of Melbourne, 3002, Parkville, VIC, Australia  |4 aut 
700 1 |a Tran  |D N.  |u Centre for Neural Engineering, Melbourne School of Engineering, The University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Meffin  |D H.  |u National Vision Research Institute, Australian College of Optometry, Centre for Integrative Brain Function, Department of Optometry and Vision Science, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
700 1 |a Prawer  |D S.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
773 0 |t Biomedical Microdevices  |d Springer US; http://www.springer-ny.com  |g 17/3(2015-06-01), 1-11  |x 1387-2176  |q 17:3<1  |1 2015  |2 17  |o 10544 
856 4 0 |u https://doi.org/10.1007/s10544-015-9952-y  |q text/html  |z Onlinezugriff via DOI 
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950 |B NATIONALLICENCE  |P 700  |E 1-  |a Ahnood  |D A.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Escudie  |D M.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Cicione  |D R.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Abeyrathne  |D C.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Ganesan  |D K.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Fox  |D K.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Garrett  |D D.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Stacey  |D A.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Apollo  |D N.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Lichter  |D S.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Thomas  |D C.  |u Melbourne Dental School, University of Melbourne, 3002, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Tran  |D N.  |u Centre for Neural Engineering, Melbourne School of Engineering, The University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Meffin  |D H.  |u National Vision Research Institute, Australian College of Optometry, Centre for Integrative Brain Function, Department of Optometry and Vision Science, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 700  |E 1-  |a Prawer  |D S.  |u School of Physics, University of Melbourne, 3010, Parkville, VIC, Australia  |4 aut 
950 |B NATIONALLICENCE  |P 773  |E 0-  |t Biomedical Microdevices  |d Springer US; http://www.springer-ny.com  |g 17/3(2015-06-01), 1-11  |x 1387-2176  |q 17:3<1  |1 2015  |2 17  |o 10544